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Suprem-III User´s Manual
NITRIDE log Specifies that the solubility data applies to the impurity in the material nitride.
(unit: )
(default: false.)
(synonym: )
OXIDE log Specifies that the solubility data applies to the impurity in the material
oxide.
(unit: )
(default: false.)
(synonym: )
PHOSPHOR log Specifies that the solubility data applies to the dopant phosphorus.
(unit: )
(default: false.)
(synonym: )
POLYSILI log Specifies that the solubility data applies to the impurity in the material
polysilicon.
(unit: )
(default: false.)
(synonym: )
SKIP Num Specifies the number of data points to be skipped on input.
(unit: )
(default: 0)
(synonym: )
SILICON log Specifies that the solubility data applies to the impurity in the material
silicon.
(unit: )
(default: false.)
(synonym: )
TEMP.COL Num Specifies the column in the data file containing the temperature associated
with the corresponding solubility values.
(unit: )
(default: )
(synonym: )
The SOLUBILITY statement inputs the solubility vs. temperature data from the specified file and associates
it with one or more impurities in one or more materials. The data files must be organized in columns, with one
column containing the temperature values and another containing corresponding solubility concentrations. The data
in the columns must be organized such that the temperature values are in increasing order. Comment lines may appear
at any point as long as they are preceded the comment character in column one.