Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
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<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />
/NITRIDE Log Specifies that the constant is the volume ratio of the other material specified<br />
to silicon nitride.<br />
(unit: )<br />
(default: false.)<br />
(synonym: )<br />
/OXIDE Log Specifies that the constant is the volume ratio of the other material specified<br />
to silicon dioxide.<br />
(unit: )<br />
(default: false.)<br />
(synonym: )<br />
/POLYSIL Log Specifies that the constant is the volume ratio of the other material specified<br />
to polycrystalline silicon.<br />
(unit: )<br />
(default: false.)<br />
(synonym: )<br />
/SILICON Log Specifies that the constant is the volume ratio of the other material specified<br />
to silicon.<br />
(unit: )<br />
(default: false.)<br />
(synonym: )<br />
When oxidizing silicon, whether single crystal, poly crystalline, or silicon nitride, the oxide formed may<br />
have a different volume from that of the original material. The ratio between the volume of the original material and<br />
the resulting oxide is needed for modeling the moving interface during oxidation.<br />
The ratio between any of the materials defined in the program can be specified, but only those between the<br />
various silicon forms and silicon dioxide are used by the program.
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