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Suprem-III User´s Manual
24. Implant Statement
---------------------------
The IMPLANT statement is used to simulate the ion-implantation of impurities into the structure. Four
types of implantation models are available, a numerical method based on the Boltzman transport equation, and three
analytical methods based on simple Gaussian, two sided Gaussian, or Pearson type-IV distributions.
IMPLANT
DOSE= ENERGY=
( ANTIMONY | ARSENIC | BF2 | BORON | PHOSPHOR )
( GAUSSIAN
| 2-GAUSSI
| PEARSON
| ( BOLTZMAN [ MINSTEPS= ] [ AT.WT= ] [ AT.NUMB= ] )
)
Name Type Description
---- ---- -----------
ANTIMONY Log Specifies that the ion to be implanted is antimony.
(unit: )
(default: false.)
(synonym: SB)
ARSENIC Log Specifies that the ion to be implanted is arsenic.
(unit: )
(default: false.)
(synonym: AS)
AT .NUMB Num The atomic number of the ion to be implanted.
(unit: )
(default: The last value specified in the corresponding impurity coefficient
statement)
(synonym: )
AT .WT Num The atomic weight of the ion to be implanted.
(unit: amu)
(default: The last value specified in the corresponding impurity coefficient
statement)
(synonym: AT.MASS)
BF2 Log Specifies that the ion to be implanted is boron-difluoride.
(unit: )
(default: false.)
(synonym: )
BOLTZMAN Log Specifies that the Boltzman transport model is to be used in simulating
the implantation.
(unit: )
(default: false.)
(synonym: )