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Suprem-III User´s Manual
38. Resistivity Statement
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The RESISTIVITY statement is used to input a table of ordered resistivity/concentration pairs. This data
is used by the program to calculate the resistivity of diffused layers in the current structure.
RESISTIVITY
FILE= CONC.COL= RES.COL=
[ SKIP= ] [ COUNT= ] [ COM.CHAR= ]
( ANTIMONY | ARSENIC | BORON | PHOSPHOR )
( ALUMINUM | NITRIDE | OXIDE | POLYSILICON | SILICON )
Name Type Description
---- ---- -----------
ALUMINUM Log Specifies that the resistivity data applies to the impurity in the material
aluminum.
(unit: )
(default: false.)
(synonym: )
ANTIMONY Log Specifies that the resistivity data applies to the dopant antimony.
(unit: )
(default: false.)
(synonym: SB)
ARSENIC Log Specifies that the resistivity data applies to the dopant arsenic.
(unit: )
(default: false.)
(synonym: AS)
BORON Log Specifies that the resistivity data applies to the dopant boron.
(unit: )
(default: false.)
(synonym: )
COM.CHAR Char Specifies the comment character for the lines in the file. Any line with
this character in column one is ignored.
(unit: )
(default: *)
(synonym: )
CONC.COL Num Specifies the column in the data file containing the concentrations at
which the resistivity data applies.
(unit: )
(default: )
(synonym: CON.COL)
COUNT Num Specifies the number of data points to be input.
(unit: )
(default: Input all every data point.)
(synonym: )