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Suprem-III User´s Manual
surface. Plotted or graphic output consists of plots of the specified impurity concentrations versus distance.
7. SUPREM-III Input Statements
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SUPREM-III normally takes its input from a user specified disk file. This file is made up of various statements
identified by a statement name followed by a parameter list. The statement name is delimited from the parameter
list by either a comma and/or one or more blanks. If a comma is present, it may be preceded or followed by
any number of blanks. Parameters in a SUPREM-III parameter list are delimited from each other in the same way
the statement name is delimited. If more than one line of input is required for a particular statement, it may be continued
on subsequent lines by placing a plus sign as the first non-blank character on the continuation lines.
Parameters in a SUPREM-III parameter list may be one of three types that correspond to the types of values
that they may take on. These types are; logical, numerical, and character. Logical parameters take on a value of
true if the parameter name appears by itself and a value of false if it is preceded by the NOT, (ˆ), character. Numerical
type parameters are assigned values in the parameter list by having the parameter name followed by an equal
sign and the value. Blanks on either side of the equal sign are ignored. Character parameters may appear in one of
two ways depending of the statement involved. In one case they hav e a formal parameter name and they are assigned
a character string by use of an equal sign in the same way as a numerical parameter. In the other case the
statement has the character parameter as the only valid parameter and the character string appears by itself following
the statement name without an associated parameter name.
8. Manual Format
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This manual presents each statement showing the statement name and the associated list of parameters.
There are a number of special characters that are used to aid in the description of the parameter lists. These characters
are , [, ], (, ), and |.
The characters are used to indicate classes of things. For example a parameter description might appear
as:
CONCENTRATION=
which indicates that the parameter name is concentration and it is assigned a numerical value. The defines a
class of things represented by n, where n represents the set of numerical values. Valid numerical values are of the
form:
9 1.2 -.345 6.7E8 -9.01E-2
The only other class defined in this manual is that of character strings represented by .
The [] characters enclose sets of optional items, usually parameters. For example:
STMT1 [ PARM1 ] [ PARM2 PARM3 ] [ PARM4 [ PARM5 ] ]
indicates that on the STMT1 statement, the PARM1 parameter is optional. PARM2 and PARM3 are optional but if
one is specified, both must be specified. PARM4 and PARM5 are optional but PARM5 may be specified only if
PARM4 is specified.
When one or more of a list of items are to be chosen from, they are separated by a | character and enclosed
in parenthesis. For example:
STMT2 (PARM1 | PARM2 | (PARM3 PARM4))