Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
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<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />
STOP [ ]<br />
TITLE [ ]<br />
VOL.RATIO<br />
( SILICON | OXIDE | POLYSILI | NITRIDE | ALUMINUM )<br />
( /SILICON | /OXIDE | /POLYSIL | /NITRIDE | /ALUMINUM )<br />
RATIO=<br />
V.THRESHOLD<br />
[ V.SUB1= ] [ V.SUB2= ] [ DV.SUB= ]<br />
[ (SURFACE | BACKSIDE | (BULKCONC= (PTYPE | NTYPE))) ]<br />
[ Q.F= ] [ TEMPERAT= ]<br />
[ FILENAME= [ APPEND ] ]<br />
WETO2<br />
[ ( | | )<br />
[ LIN.L.0= ] [ LIN.L.E= ]<br />
[ LIN.H.0= ] [ LIN.H.E= ]<br />
[ THINOX.0= ] [ THINOX.E= ] [ THINOX.L= ]<br />
]<br />
[ PAR.L.0= ] [ PAR.L.E= ]<br />
[ PAR.H.0= ] [ PAR.H.E= ]<br />
[ LIN.BREA= ] [ PAR.BREA= ]<br />
[ LIN.PDEP= ] [ PAR.PDEP= ]<br />
[ PRESSURE= ] [ HCL%= ]<br />
[ GAMMA.0= ] [ GAMMA.E= ]<br />
[ DELTA.0= ] [ DELTA.E= ]<br />
[ EXP.0= ] [ EXP.E= ]<br />
[ NIOX.0= ] [ NIOX.E= ] [ NIOX.F= ]<br />
[ CL.ROW= [ CL.PCT= ]<br />
CL.COLUM= [ CL.TEMPE= ]<br />
[ CL.DEP.L= ] [ CL.DEP.P= ]<br />
]