Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
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<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />
BORON<br />
[ NAME= ] [ ACCEPTOR ]<br />
[ AT.WT= ] [ AT.NUMB= ]<br />
[ IONFILE1= ] [ IONFILE2= ]<br />
[ ( ( SILICON<br />
[ FII.0= ] [ FII.E= ]<br />
[ K.MF= ] [ K.A= ] [ K.P= ]<br />
)<br />
| ( POLYSILI<br />
[ ENTROPY= ] [ HEAT.SEG= ] [ Q.SITES= ]<br />
[ FII.0= ] [ FII.E= ]<br />
)<br />
| ( OXIDE | NITRIDE | ALUMINUM )<br />
[ ELECT.ST= ]<br />
[ DIX.0= ] [ DIX.E= ]<br />
[ DIP.0= ] [ DIP.E= ]<br />
]<br />
COMMENT []<br />
or<br />
$ []<br />
DEPOSITION<br />
THICKNES=<br />
( SILICON ( | | )<br />
| POLYSILI<br />
TEMPERAT= [ PRESSURE= | GRAINSIZ= ]<br />
| OXIDE<br />
| NITRIDE<br />
| ALUMINUM<br />
)<br />
[ DX= ] [ XDX= ] [ SPACES= ] [ MIN.DX= ]<br />
[ CONCENTRATION=<br />
(ANTIMONY | ARSENIC | BORON | PHOSPHOR)<br />
]<br />
DIFFUSION<br />
TIME= TEMPERAT= [ T.RATE= ]<br />
[ ( GAS.CONC= | SOLIDSOL )<br />
( ANTIMONY | ARSENIC | BORON | PHOSPHOR )<br />
]<br />
[ ( DRY O2 | WETO2 | NITROGEN )<br />
[ PRESSURE= ] [ P.RATE= ] [ HCL%= ]<br />
]<br />
[ DTMIN= ] [ DTMAX= ]<br />
[ ABS.ERR= ] [ REL.ERR= ]
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