Suprem III - Stanford Technology CAD Home Page

-80-
Suprem-III User´s Manual
NE.0 Num The pre-exponential constant for Ne, the concentration at which the
P+V= pairs disassociate. Used to calculate the diffusivity of phosphorus
at high concentrations.
(unit: atoms/cmˆ3.)
(default: the current value.)
(synonym: )
NE.E Num The activation energy for calculating Ne, the concentration at which the
P+V= pairs disassociate. Used to calculate the diffusivity of phosphorus
at high concentrations.
(unit: electron volts.)
(default: the current value.)
(synonym: )
NITRIDE Log Specifies that the material dependent parameters apply to phosphorus in
silicon nitride.
(unit: )
(default: false.)
(synonym: )
OXIDE Log Specifies that the material dependent parameters apply to phosphorus in
silicon dioxide.
(unit: )
(default: false.)
(synonym: )
POLYSILI Log Specifies that the material dependent parameters apply to phosphorus in
polysilicon.
(unit: )
(default: false.)
(synonym: )
Q.SITES Num Effective density of segregation sites at a grain boundary.
(unit: sites/cmˆ2.)
(default: the current value.)
(synonym: )
SILICON Log Specifies that the material dependent parameters apply to phosphorus in
silicon.
(unit: )
(default: false.)
(synonym: )
The PHOSPHOR statement is an alias for the IMPURITY statement with an index of two and is used to
define or modify the parameters and coefficients associated with phosphorus as an impurity. Not all of the parameters
of the IMPURITY statement apply to phosphorus and so are not listed here.