Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
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<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />
1. Table Of Contents _________________________________________________________________________________________<br />
2. Introduction ______________________________________________________________________________________________<br />
3. The Simulation Structure ___________________________________________________________________________________<br />
4. Using SUPREM-<strong>III</strong> ________________________________________________________________________________________<br />
5. The SUPREM-<strong>III</strong> Grid Structure _____________________________________________________________________________<br />
6. SUPREM-<strong>III</strong> Output _______________________________________________________________________________________<br />
7. SUPREM-<strong>III</strong> Input Statements _______________________________________________________________________________<br />
8. Manual Format ___________________________________________________________________________________________<br />
9. Aluminum Statement ______________________________________________________________________________________<br />
10. Aluminum Statement ______________________________________________________________________________________<br />
11. Antimony Statement ______________________________________________________________________________________<br />
12. Arsenic Statement ________________________________________________________________________________________<br />
13. Bias Statement ___________________________________________________________________________________________<br />
14. Boron Statement __________________________________________________________________________________________<br />
15. Comment Statement _______________________________________________________________________________________<br />
16. Deposition Statement ______________________________________________________________________________________<br />
17. Diffusion Statement _______________________________________________________________________________________<br />
18. DryO2 Statement _________________________________________________________________________________________<br />
19. Electrical Statement _______________________________________________________________________________________<br />
20. End.Electrical Statement ___________________________________________________________________________________<br />
21. Epitaxy Statement ________________________________________________________________________________________<br />
22. Etch Statement ___________________________________________________________________________________________<br />
23. Grid Statement ___________________________________________________________________________________________<br />
24. Implant Statement ________________________________________________________________________________________<br />
25. Impurity Statement ________________________________________________________________________________________<br />
26. Initialize Statement _______________________________________________________________________________________<br />
27. Loadfile Statement ________________________________________________________________________________________<br />
28. Lpplot Statement _________________________________________________________________________________________<br />
29. Material Statement ________________________________________________________________________________________<br />
30. Nitride Statement _________________________________________________________________________________________<br />
31. Nitrogen Statement _______________________________________________________________________________________<br />
32. Oxide Statement __________________________________________________________________________________________<br />
33. Phosphorus Statement _____________________________________________________________________________________<br />
34. Plot Statement ___________________________________________________________________________________________<br />
35. Polysilicon Statement _____________________________________________________________________________________<br />
36. Print Statement ___________________________________________________________________________________________<br />
37. Profile Statement _________________________________________________________________________________________<br />
38. Resistivity Statement ______________________________________________________________________________________<br />
39. Savefile Statement ________________________________________________________________________________________<br />
40. Segregation Statement _____________________________________________________________________________________<br />
41. Silicon Statement _________________________________________________________________________________________<br />
42. Solubility Statement _______________________________________________________________________________________<br />
43. Stop Statement ___________________________________________________________________________________________<br />
44. Title Statement ___________________________________________________________________________________________<br />
45. Vol.Ratio Statement _______________________________________________________________________________________<br />
46. V.Threshold Statement _____________________________________________________________________________________<br />
47. WetO2 Statement _________________________________________________________________________________________<br />
48. Statement Summary _______________________________________________________________________________________<br />
49. Example 1: NMOS Silicon Gate. _____________________________________________________________________________<br />
50. Example 2: Bipolar Polysilicon Doped Emitter. _________________________________________________________________<br />
51. Suggestions and Bug Reports _______________________________________________________________________________
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