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Suprem-III User´s Manual
CD Num This parameter is used to calculate the temperature dependent part of the
expression for bandgap narrowing due to lattice misfit strain from high
concentrations of phosphorus.
(unit: (atoms/cmˆ3)(degrees Centigradeˆ2).)
(default: the current value.)
(synonym: )
CHEMICAL Log Specifies that the clustering coefficients apply to the impurity from a
chemical source.
(unit: )
(default: false.)
(synonym: )
CTN.0 Num The pre-exponential constant used in calculating the impurity clustering
coefficient.
(unit: atoms/cmˆ3.)
(default: the current value.)
(synonym: )
CTN.E Num The activation energy used in calculating the impurity clustering coefficient.
(unit: electron volts.)
(default: the current value.)
(synonym: )
CTN.F Num The power dependence of the concentration used in calculating the impurity
clustering coefficient.
(unit: )
(default: the current value.)
(synonym: )
DAMAGEST Num The factor in the implant dose dependent expression for calculating the
bandgap narrowing due to the residual damage of phosphorus implants.
(unit: electron volts-cmˆ(1/2).)
(default: the current value.)
(synonym: )
DIM.0 Num The pre-exponential constant of the diffusion coefficient of the impurity
diffusing with singly negative vacancies.
(unit: micronsˆ2/minute.)
(default: the current value.)
(synonym: )
DIM.E Num The activation energy of the diffusion coefficient of the impurity diffusing
with singly negative vacancies.
(unit: electron volts.)
(default: the current value.)
(synonym: )
DIMM.0 Num The pre-exponential constant of the diffusion coefficient of the impurity
diffusing with doubly negative vacancies.
(unit: micronsˆ2/minute.)
(default: the current value.)
(synonym: )
DIMM.E Num The activation energy of the diffusion coefficient of the impurity diffusing
with doubly negative vacancies.
(unit: electron volts.)
(default: the current value.)