Suprem III - Stanford Technology CAD Home Page

-81-
Suprem-III User´s Manual
34. Plot Statement
----------------------
The PLOT statement outputs a semi-logarithmic plot of the specified impurity concentrations versus depth
into the structure.
PLOT
[ ACTIVE ] [ CHEMICAL ] [ TOTAL ] [ NET ]
[ ANTIMONY ] [ ARSENIC ] [ BORON ] [ PHOSPHOR ]
[ XMIN= ] [ XMAX= ] [ CMIN= ] [ CMAX= ]
[ LAYER1 ] [ LAYER2 ] ... [ LAYER10 ]
[ CLEAR ] [ AXIS ] [ LINETYPE= ]
[ TITLE= ] [ LABEL= ]
[ XPWIDTH= ] [ YPWIDTH= ]
[ XOFFSET= ] [ YOFFSET= ]
[ DEVICE= ] [ FILENAME= ]
Name Type Description
---- ---- -----------
ACTIVE Log Specifies that the electrically active concentrations of the specified impurities
are to be plotted.
(unit: )
(default: false.)
(synonym: )
ANTIMONY Log Specifies that the antimony concentration, either active and/or chemical,
is to be plotted.
(unit: )
(default: false.)
(synonym: SB)
ARSENIC Log Specifies that the arsenic concentration, either active and/or chemical, is
to be plotted.
(unit: )
(default: false.)
(synonym: AS)
AXIS Log Specifies that the axis is to be plotted.
(unit: )
(default: true.)
(synonym: )
BORON Log Specifies that the boron concentration, either active and/or chemical, is to
be plotted.
(unit: )
(default: false.)
(synonym: )
CHEMICAL Log Specifies that the chemical concentration of the specified impurities are
to be plotted.
(unit: )
(default: false.)
(synonym: )