Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
-43-<br />
<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />
23. Grid Statement<br />
-----------------------<br />
The GRID statement specifies the grid spacing parameters for one or more of the layers in a structure. For<br />
the first layer, the thickness may also be extended.<br />
GRID<br />
LAYER. [ THICKNES= ] [ DX= ] [ MIN.DX= ]<br />
[ XDX= ] [ SPA CES= ]<br />
Name Type Description<br />
---- ---- -----------<br />
DX Num The nominal grid spacing in to be used in the specified layer(s) at the location<br />
associated with the XDX parameter.<br />
(unit: microns.)<br />
(default: The current nominal grid spacing.)<br />
(synonym: )<br />
LAYER. Log Specifies that the grid parameters are to apply to the n’th layer of the<br />
structure.<br />
(unit: )<br />
(default: false.)<br />
(synonym: )<br />
MIN.DX Num The minimum grid spacing that can be used in the specified layer(s).<br />
(unit: microns.)<br />
(default: The current minimum grid spacing.)<br />
(synonym: )<br />
SPACES Num The number of spaces to be used in the specified layer(s).<br />
(unit: )<br />
(default: The current number of spaces in the layer.)<br />
(synonym: )<br />
THICKNESS Num The thickness of the first layer. If the specified thickness is greater than<br />
the current layer thickness, then additional material is added to the bottom<br />
of the layer. The value specified must be greater than or equal to<br />
the current thickness.<br />
(unit: microns.)<br />
(default: The current layer thickness.)<br />
(synonym: )<br />
XDX Num The distance from the surface of the layer at which the nominal grid<br />
spacing, DX, applies.<br />
(unit: microns.)<br />
(default: The last value specified.)<br />
(synonym: )<br />
The GRID statement is used primarily to change the grid spacing of one or more layers of the current<br />
structure. In the case of the first, or bottom layer, the GRID statement may be used to extend the depth of the layer<br />
by adding additional material to the bottom of the structure. In this case, the impurity concentration at the bottommost<br />
cell in the structure is used uniformly in the added region.
Change language