Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
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<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />
RESISTIVITY<br />
FILE= CONC.COL= RES.COL=<br />
[ SKIP= ] [ COUNT= ] [ COM.CHAR= ]<br />
( ANTIMONY | ARSENIC | BORON | PHOSPHOR )<br />
( ALUMINUM | NITRIDE | OXIDE | POLYSILICON | SILICON )<br />
SAVEFILE<br />
FILENAME= ( ALL | COEFFICI | STRUCTUR | EXPORT )<br />
[ FORMATTE ]<br />
SEGREGAT<br />
( ( SILICON<br />
[ 100.FACT= ] [ 110.FACT= ] [ 111.FACT= ]<br />
)<br />
| OXIDE | POLYSILI | NITRIDE | ALUMINUM | AIR<br />
)<br />
( ( /SILICON<br />
[ 100.FACT= ] [ 110.FACT= ] [ 111.FACT= ]<br />
)<br />
| /OXIDE | /POLYSIL | /NITRIDE | /ALUMINU | /AIR<br />
)<br />
( ANTIMONY | ARSENIC | BORON | PHOSPHOR )<br />
[ SEG.0= ] [ SEG.E= ]<br />
[ TRANS.0= ] [ TRANS.E= ]<br />
[ MAX.0= ] [ MAX.E= ]<br />
[ ( MODEL.1 | MODEL.2 ) ]<br />
[ MUI.0= ] [ MUI.E= ]<br />
[ GRATE.0= ] [ GRATE.E= ]<br />
[ C.INIT= ] [ C.THRESH= ] [ L.THICK= ]<br />
SILICON<br />
[ NAME= ] [ DX.DEFAU= ]<br />
[ SEMICOND ]<br />
[ SPECIES= ] [ DENSITY= ]<br />
[ AT.WT.1= ] [ AT.NUM.1= ] [ ABUND.1= ]<br />
[ NI.0= ] [ NI.E= ] [ NI.F= ] [ DEFECTLN= ]<br />
[ OEDK.0= ] [ OEDK.E= ] [ OED.RATE= ]<br />
[ 100.OEDF= ] [ 110.OEDF= ] [ 111.OEDF= ]<br />
[ AFFINITY= ] [ EPSILONF= ]<br />
[ N.VALENC= ] [ N.CONDUC= ] [ BAND.GAP= ]<br />
[ K.M= ]<br />
SOLUBILITY<br />
FILE= CONC.COL= TEMP.COL=<br />
[ SKIP= ] [ COUNT= ] [ COM.CHAR= ]<br />
( ANTIMONY | ARSENIC | BORON | PHOSPHOR )<br />
( ALUMINUM | NITRIDE | OXIDE | POLYSILICON | SILICON )