Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
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<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />
ARSENIC<br />
[ NAME= ] [ DONOR ]<br />
[ AT.WT= ] [ AT.NUMB= ]<br />
[ IONFILE1= ] [ IONFILE2= ]<br />
[ ( ( SILICON<br />
[ FII.0= ] [ FII.E= ]<br />
[ K.MF= ] [ K.A= ] [ K.P= ]<br />
[ ( IMPLANT | CHEMICAL )<br />
[ CTN.0= ] [ CTN.E= ] [ CTN.F= ]<br />
]<br />
)<br />
| ( POLYSILI<br />
[ ENTROPY= ] [ HEAT.SEG= ] [ Q.SITES= ]<br />
[ FII.0= ] [ FII.E= ]<br />
[ ( IMPLANT | CHEMICAL )<br />
[ CTN.0= ] [ CTN.E= ] [ CTN.F= ]<br />
]<br />
)<br />
| ( OXIDE | NITRIDE | ALUMINUM )<br />
[ ELECT.ST= ]<br />
[ DIX.0= ] [ DIX.E= ]<br />
[ DIM.0= ] [ DIM.E= ]<br />
[ DIMM.0= ] [ DIMM.E= ]<br />
]<br />
BIAS<br />
LAYER=<br />
( [ V.ELECTR= ] [ DV.ELECTR= ] )<br />
| ( ( [ DIFFUSIO= ]<br />
[ V.MAJORI= ] [ DV.MAJOR= ]<br />
[ V.MINORI= ] [ DV.MINOR= ]<br />
)<br />
| [ FLOAT ]<br />
)
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