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Suprem-III User´s Manual
29. Material Statement
----------------------------
The MATERIAL statement is used to input or modify the characteristics of a layer material. The program
is presently configured to handle up to ten different material types. Materials with index numbers one through five
are defaulted to silicon, silicon dioxide, polysilicon, silicon nitride, and aluminum, respectively. The parameter values
for the defaulted materials may also be accessed via the SILICON, OXIDE, POLYSILI, NITRIDE, and ALU-
MINUM statements.
MATERIAL
[ INDEX= ]
[ NAME= ] [ DX.DEFAU= ]
[ ( SEMICOND | CONDUCTO | INSULATO ) ]
[ SPECIES= ] [ DENSITY= ]
[ AT.WT.1= ] [ AT.WT.2= ] [ AT.WT.3= ]
[ AT.NUM.1= ] [ AT.NUM.2= ] [ AT.NUM.3= ]
[ ABUND.1= ] [ ABUND.2= ] [ ABUND.3= ]
[ DIFX.0= ] [ DIFX.E= ]
[ DIMX.0= ] [ DIFM.E= ]
[ DIMMX.0= ] [ DIFMM.E= ]
[ DIFP.0= ] [ DIFP.E= ]
[ NI.0= ] [ NI.E= ] [ NI.F= ] [ DEFECTLN= ]
[ OEDK.0= ] [ OEDK.E= ] [ OED.RATE= ]
[ 100.OEDF= ] [ 110.OEDF= ] [ 111.OEDF= ]
[ GSZ.H.0= ] [ GSZ.H.E= ]
[ GSZ.L.0= ] [ GSZ.L.E= ]
[ MIN.GRAI= ] [ TEMP.BRE= ]
[ RATIO.0= ] [ RATIO.E= ]
[ GEO.FACT= ] [ GBE.0= ] [ GBE.E= ]
[ TAU.0= ] [ TAU.E= ]
[ AFFINITY= ] [ WORK.FUN= ] [ EPSILONF= ]
[ N.VALENC= ] [ N.CONDUC= ] [ BAND.GAP= ]
[ K.M= ]
Name Type Description
---- ---- -----------
ABUND.1 Num The relative abundance of element one in the material. The sum of all
abundances for a material must equal one.
(unit: )
(default: the current value.)
(synonym: )
ABUND.2 Num The relative abundance of element two in the material. The sum of all
abundances for a material must equal one.
(unit: )
(default: the current value.)
(synonym: )
ABUND.3 Num The relative abundance of element three in the material. The sum of all
abundances for a material must equal one.
(unit: )
(default: the current value.)
(synonym: )