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Suprem-III User´s Manual
17. Diffusion Statement
-----------------------------
The DIFFUSION statement is used to model high temperature diffusion in both oxidizing and non-oxidizing
ambients.
DIFFUSION
TIME= TEMPERAT= [ T.RATE= ]
[ ( GAS.CONC= | SOLIDSOL )
( ANTIMONY | ARSENIC | BORON | PHOSPHOR )
]
[ ( DRY O2 | WETO2 | NITROGEN )
[ PRESSURE= ] [ P.RATE= ] [ HCL%= ]
]
[ DTMIN= ] [ DTMAX= ]
[ ABS.ERR= ] [ REL.ERR= ]
Name Type Description
---- ---- -----------
ABS.ERR Num Specifies the maximum desired absolute truncation error. Used to control
the time step as described below.
(unit: centimetersˆ(-3))
(default: 1.0E14)
(synonym: )
ANTIMONY Log Specifies that the impurity in the ambient gas is antimony.
(unit: )
(default: false.)
(synonym: SB)
ARSENIC Log Specifies that the impurity in the ambient gas is arsenic.
(unit: )
(default: false.)
(synonym: AS)
BORON Log Specifies that the impurity in the ambient gas is boron.
(unit: )
(default: false.)
(synonym: )
DTMAX Num The largest time increment to be used during the solution.
(unit: minutes.)
(default: 5.0)
(synonym: )
DTMIN Num The smallest time increment to be used during the solution.
(unit: minutes.)
(default: 0.005)
(synonym: )
DRYO2 Log Specifies that the ambient gas consists of dry oxygen.
(unit: )
(default: false.)
(synonym: )