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Suprem III - Stanford Technology CAD Home Page

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-74-<br />

<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />

32. Oxide Statement<br />

-------------------------<br />

The OXIDE statement is used to input or modify the characteristics of silicon dioxide as a layer material.<br />

OXIDE<br />

[ NAME= ] [ DX.DEFAU= ]<br />

[ INSULATO ]<br />

[ SPECIES= ] [ DENSITY= ]<br />

[ AT.WT.1= ] [ AT.WT.2= ]<br />

[ AT.NUM.1= ] [ AT.NUM.2= ]<br />

[ ABUND.1= ] [ ABUND.2= ]<br />

[ EPSILONF= ]<br />

Name Type Description<br />

---- ---- -----------<br />

ABUND.1 Num The relative abundance of element one in the material. The sum of all<br />

abundances for a material must equal one.<br />

(unit: )<br />

(default: the current value.)<br />

(synonym: )<br />

ABUND.2 Num The relative abundance of element two in the material. The sum of all<br />

abundances for a material must equal one.<br />

(unit: )<br />

(default: the current value.)<br />

(synonym: )<br />

AT .NUM.1 Num The atomic number of element one in the material.<br />

(unit: )<br />

(default: the current value.)<br />

(synonym: )<br />

AT .NUM.2 Num The atomic number of element two in the material.<br />

(unit: )<br />

(default: the current value.)<br />

(synonym: )<br />

AT .WT.1 Num The atomic weight of element one in the material.<br />

(unit: amu)<br />

(default: the current value.)<br />

(synonym: )<br />

AT .WT.2 Num The atomic weight of element two in the material.<br />

(unit: amu)<br />

(default: the current value.)<br />

(synonym: )<br />

DENSITY Num The density of the material.<br />

(unit: grams/cmˆ3.)<br />

(default: the current value.)<br />

(synonym: )

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