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Suprem-III User´s Manual
(synonym: )
DIX.0 Num The pre-exponential constant of the diffusion coefficient of the impurity
diffusing with neutral vacancies.
(unit: micronsˆ2/minute.)
(default: the current value.)
(synonym: )
DIX.E Num The activation energy of the diffusion coefficient of the impurity diffusing
with neutral vacancies.
(unit: electron volts.)
(default: the current value.)
(synonym: )
DONOR Log Specifies that the impurity is a donor in silicon.
(unit: )
(default: the current value.)
(synonym: )
ELECT.ST Num The electric stopping power of the impurity in the specified material.
(unit: KeV/micron.)
(default: the current value.)
(synonym: )
ENTROPY Num The entropy factor. Used to calculate the equilibrium segregation factor
at polysilicon grain boundaries.
(unit: )
(default: the current value.)
(synonym: )
FII.0 Num The pre-exponential constant of the fractional partial-interstitialcy contribution.
(unit: (microns/minute)ˆ(-1/2))
(default: the current value.)
(synonym: )
FII.E Num The activation energy of the fractional partial-interstitialcy contribution.
(unit: electron volts.)
(default: the current value.)
(synonym: )
HEAT.SEG Num The activation energy of the equilibrium segregation factor at polysilicon
grain boundaries.
(unit: electron volts.)
(default: the current value.)
(synonym: )
IMPLANT Log Specifies that the impurity clustering coefficients apply to the impurity
from an implanted source.
(unit: )
(default: false.)
(synonym: )
IONFILE1 Char Specifies the primary ion implant range data file for implants using the
analytic distributions. This file will be searched for the range statistics
when implanting atomic phosphorus.
(unit: )
(default: the last file specified.)
(synonym: )