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Suprem-III User´s Manual
DENSITY Num The density of the material.
(unit: grams/cmˆ3.)
(default: the current value.)
(synonym: )
DX.DEFAU Num The default nominal grid spacing for any layer containing this material.
(unit: microns.)
(default: the current value.)
(synonym: )
EPSILONF Num The dielectric constant of the material relative the dielectric constant of
air.
(unit: )
(default: the current value.)
(synonym: )
K.M Num Used in R. Reif’s epitaxial growth model (see reference in EPITAXY
statement). K.m is the mass transport coefficient for silane in hydrogen.
(unit: microns/minute/atmosphere)
(default: the current value)
(synonym: )
NAME Char The name of the material.
(unit: )
(default: the current name of the material.)
(synonym: )
NI.0 Num The pre-factor used in the calculation of the intrinsic carrier concentration.
(unit: (carriers/cmˆ3)(degrees Kelvin)ˆ(3/2).)
(default: the current value.)
(synonym: )
NI.E Num The activation energy used in the calculation of the intrinsic carrier concentration.
(unit: electron volts.)
(default: the current value.)
(synonym: )
NI.F Num The exponent to the absolute temperature used in the calculation of the
intrinsic carrier concentration.
(unit: )
(default: the current value.)
(synonym: )
N.CONDUC Num The carrier concentration in the conduction band of the material.
(unit: carriers/cmˆ3.)
(default: the current value.)
(synonym: )
N.VALENC Num The carrier concentration in the valence band of the material.
(unit: carriers/cmˆ3.)
(default: the current value.)
(synonym: )