Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
-123-<br />
<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />
DRYO2<br />
[ ( | | )<br />
[ LIN.L.0= ] [ LIN.L.E= ]<br />
[ LIN.H.0= ] [ LIN.H.E= ]<br />
[ THINOX.0= ] [ THINOX.E= ] [ THINOX.L= ]<br />
]<br />
[ PAR.L.0= ] [ PAR.L.E= ]<br />
[ PAR.H.0= ] [ PAR.H.E= ]<br />
[ LIN.BREA= ] [ PAR.BREA= ]<br />
[ LIN.PDEP= ] [ PAR.PDEP= ]<br />
[ PRESSURE= ] [ HCL%= ]<br />
[ GAMMA.0= ] [ GAMMA.E= ]<br />
[ DELTA.0= ] [ DELTA.E= ]<br />
[ EXP.0= ] [ EXP.E= ]<br />
[ NIOX.0= ] [ NIOX.E= ] [ NIOX.F= ]<br />
[ CL.ROW= [ CL.PCT= ]<br />
CL.COLUM= [ CL.TEMPE= ]<br />
[ CL.DEP.L= ] [ CL.DEP.P= ]<br />
]<br />
ELECTRICAL<br />
[ STEPS= ] [ EXTENT= ] [ TEMPERAT= ]<br />
[ ERROR= ] [ MAX.ITER= ] [ FILE.OUT= ]<br />
END.ELEC [ ]<br />
EPITAXY<br />
TEMPERAT= TIME= [ DX= ]<br />
( GRO WTH.R= | PP.SILAN= )<br />
[ ( ANTIMONY | ARSENIC | BORON | PHOSPHOR )<br />
( CONCENTR= | PP.DOPAN= )<br />
[ DTMIN= ] [ DTMAX= ]<br />
[ ABS.ERR= ] [ REL.ERR= ]<br />
ETCH<br />
( SILICON | POLYSILI | OXIDE | NITRIDE | ALUMINUM )<br />
[ ( THICKNES= | ALL ) ]<br />
GRID<br />
LAYER. [ THICKNES= ] [ DX= ] [ MIN.DX= ]<br />
[ XDX= ] [ SPA CES= ]