Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
-32-<br />
<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />
CL.ROW Num The row number in the table of coefficients used to calculate the chlorine<br />
dependence of the oxidation rates.<br />
(unit: )<br />
(default: the current value.)<br />
(synonym: )<br />
CL.TEMPE Num The temperature for which the coefficients in the specified column are<br />
valid.<br />
(unit: degrees Centigrade.)<br />
(default: the current value.)<br />
(synonym: )<br />
DELTA.0 Num The pre-exponential factor of the delta coefficient used in calculating the<br />
impurity concentration dependence of the parabolic oxidation rate.<br />
(unit: cmˆ3/atom.)<br />
(default: the current value.)<br />
(synonym: )<br />
DELTA.E Num The activation energy of the delta coefficient used in calculating the impurity<br />
concentration dependence of the parabolic oxidation rate.<br />
(unit: electron volts.)<br />
(default: the current value.)<br />
(synonym: )<br />
EXP.0 Num The pre-exponential factor of the exponent used in calculating the impurity<br />
concentration dependence of the parabolic oxidation rate.<br />
(unit: )<br />
(default: the current value.)<br />
(synonym: )<br />
EXP.E Num The activation energy of the exponent used in calculating the impurity<br />
concentration dependence of the parabolic oxidation rate.<br />
(unit: electron volts.)<br />
(default: the current value.)<br />
(synonym: )<br />
GAMMA.0 Num The pre-exponential factor of the gamma coefficient used in calculating<br />
the impurity concentration dependence of the linear oxidation rate.<br />
(unit: )<br />
(default: the current value.)<br />
(synonym: )<br />
GAMMA.E Num The activation energy of the gamma coefficient used in calculating the<br />
impurity concentration dependence of the linear oxidation rate.<br />
(unit: electron volts.)<br />
(default: the current value.)<br />
(synonym: )<br />
HCL% Num The default percentage of chlorine present in the ambient.<br />
(unit: percent.)<br />
(default: the current value.)<br />
(synonym: )<br />
LIN.BREA Num The temperature at which the temperature dependence of the linear oxidation<br />
rate changes.<br />
(unit: degrees Centigrade.)<br />
(default: the current value.)<br />
(synonym: )
Change language