Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
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-90-<br />
<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />
36. Print Statement<br />
-----------------------<br />
The PRINT statement outputs information about the structure being simulated and the coefficients used in<br />
the simulation. The printed output may consist of the impurity concentrations versus depth into the structure, junction<br />
depths, sheet resistivities, layer thicknesses, diffusion or oxidation rates, etc.<br />
PRINT<br />
[ CONCENTR<br />
[ ACTIVE ] [ CHEMICAL ] [ ALL ] [ TOTAL ] [ NET ]<br />
[ ANTIMONY ] [ ARSENIC ] [ BORON ] [ PHOSPHOR ]<br />
[ XMIN= ] [ XMAX= ]<br />
]<br />
[ IMPURITY<br />
[ ALL<br />
| ( ANTIMONY | ARSENIC | BORON | PHOSPHOR )<br />
]<br />
]<br />
[ MATERIAL<br />
[ ALL<br />
| ( SILICON | POLYSILI | OXIDE | NITRIDE | ALUMINUM )<br />
]<br />
]<br />
[ LAYERS ] [ SEGREGAT ][OXIDATIO ]<br />
[ LINES/PA= ] [ COLUMNS= ]<br />
[ LU= | FILENAME= ]<br />
Name Type Description<br />
---- ---- -----------<br />
ACTIVE Log Specifies that the electrically active concentration of the specified impurities<br />
are to be printed.<br />
(unit: )<br />
(default: false.)<br />
(synonym: )<br />
ALL Log Specifies that the impurity coefficient information for all impurities is to<br />
be printed, or that the impurity distributions of all impurities present in<br />
the structure are to be printed.<br />
(unit: )<br />
(default: false.)<br />
(synonym: )<br />
ALUMINUM Log Specifies that the material coefficient information for aluminum is to be<br />
printed.<br />
(unit: )<br />
(default: false.)<br />
(synonym: )<br />
ANTIMONY Log Specifies that the antimony concentration, either active or chemical, is to<br />
be printed, or that the antimony coefficient information is to be printed.<br />
(unit: )<br />
(default: false.)<br />
(synonym: SB)