01.01.2015 Views

Suprem III - Stanford Technology CAD Home Page

Suprem III - Stanford Technology CAD Home Page

Suprem III - Stanford Technology CAD Home Page

SHOW MORE
SHOW LESS

You also want an ePaper? Increase the reach of your titles

YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.

-90-<br />

<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />

36. Print Statement<br />

-----------------------<br />

The PRINT statement outputs information about the structure being simulated and the coefficients used in<br />

the simulation. The printed output may consist of the impurity concentrations versus depth into the structure, junction<br />

depths, sheet resistivities, layer thicknesses, diffusion or oxidation rates, etc.<br />

PRINT<br />

[ CONCENTR<br />

[ ACTIVE ] [ CHEMICAL ] [ ALL ] [ TOTAL ] [ NET ]<br />

[ ANTIMONY ] [ ARSENIC ] [ BORON ] [ PHOSPHOR ]<br />

[ XMIN= ] [ XMAX= ]<br />

]<br />

[ IMPURITY<br />

[ ALL<br />

| ( ANTIMONY | ARSENIC | BORON | PHOSPHOR )<br />

]<br />

]<br />

[ MATERIAL<br />

[ ALL<br />

| ( SILICON | POLYSILI | OXIDE | NITRIDE | ALUMINUM )<br />

]<br />

]<br />

[ LAYERS ] [ SEGREGAT ][OXIDATIO ]<br />

[ LINES/PA= ] [ COLUMNS= ]<br />

[ LU= | FILENAME= ]<br />

Name Type Description<br />

---- ---- -----------<br />

ACTIVE Log Specifies that the electrically active concentration of the specified impurities<br />

are to be printed.<br />

(unit: )<br />

(default: false.)<br />

(synonym: )<br />

ALL Log Specifies that the impurity coefficient information for all impurities is to<br />

be printed, or that the impurity distributions of all impurities present in<br />

the structure are to be printed.<br />

(unit: )<br />

(default: false.)<br />

(synonym: )<br />

ALUMINUM Log Specifies that the material coefficient information for aluminum is to be<br />

printed.<br />

(unit: )<br />

(default: false.)<br />

(synonym: )<br />

ANTIMONY Log Specifies that the antimony concentration, either active or chemical, is to<br />

be printed, or that the antimony coefficient information is to be printed.<br />

(unit: )<br />

(default: false.)<br />

(synonym: SB)

Hooray! Your file is uploaded and ready to be published.

Saved successfully!

Ooh no, something went wrong!