Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
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<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />
ARSENIC Log Specifies that the arsenic concentration, either active or chemical, is to be<br />
printed, or that the arsenic coefficient information is to be printed.<br />
(unit: )<br />
(default: false.)<br />
(synonym: AS)<br />
BORON Log Specifies that the boron concentration, either active or chemical, is to be<br />
printed, or that the boron coefficient information is to be printed.<br />
(unit: )<br />
(default: false.)<br />
(synonym: )<br />
CHEMICAL Log Specifies that the chemical concentration of the specified impurities are<br />
to be printed.<br />
(unit: false.)<br />
(default: )<br />
(synonym: )<br />
COLUMNS Num The number of columns to be used in the printed output.<br />
(unit: columns.)<br />
(default: 80)<br />
(synonym: )<br />
CONCENTR Log Causes the specified impurity concentrations versus depth to be printed.<br />
(unit: )<br />
(default: false.)<br />
(synonym: )<br />
FILENAME Char The name of a file to which the information is to be output.<br />
(unit: )<br />
(default: )<br />
(synonym: )<br />
IMPURITY Log Specifies that the coefficient information concerning the specified impurities<br />
is to be printed (e.g. diffusion coefficients, atomic number and<br />
mass, etc.)<br />
(unit: )<br />
(default: false.)<br />
(synonym: )<br />
LAYERS Log Specifies that information concerning the layers of the current structure is<br />
to be printed (e.g. layer thickness, junction depths, integrated dopant<br />
concentrations, etc.)<br />
(unit: )<br />
(default: false.)<br />
(synonym: )<br />
LINES/PA Num The number of lines per page in the printed output.<br />
(unit: lines/page.)<br />
(default: 60)<br />
(synonym: )<br />
LU Num The logical unit number to which the information is to be output.<br />
(unit: )<br />
(default: the standard output lu.)<br />
(synonym: )