Suprem III - Stanford Technology CAD Home Page

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Suprem-III User´s Manual
1. Table Of Contents
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Section
Page
1. Table Of Contents __________________________________________ 1
2. Introduction _______________________________________________ 2
3. The Simulation Structure ___________________________________ 2
4. Using SUPREM-III ___________________________________________ 2
5. The SUPREM-III Grid Structure ______________________________ 3
6. SUPREM-III Output __________________________________________ 4
7. SUPREM-III Input Statements ________________________________ 4
8. Manual Format ______________________________________________ 5
9. Aluminum Statement _________________________________________ 7
10. Antimony Statement _________________________________________ 9
11. Arsenic Statement __________________________________________ 12
12. Bias Statement _____________________________________________ 16
13. Boron Statement ____________________________________________ 18
14. Comment Statement __________________________________________ 21
15. Deposition Statement _______________________________________ 22
16. Diffusion Statement ________________________________________ 25
17. DryO2 Statement ____________________________________________ 28
18. Electrical Statement _______________________________________ 32
19. End.Electrical Statement ___________________________________ 34
20. Epitaxy Statement __________________________________________ 35
21. Etch Statement _____________________________________________ 38
22. Grid Statement _____________________________________________ 39
23. Implant Statement __________________________________________ 40
24. Impurity Statement _________________________________________ 42
25. Initialize Statement _______________________________________ 47
26. Loadfile Statement _________________________________________ 50
27. Lpplot Statement ___________________________________________ 51
28. Material Statement _________________________________________ 53
29. Nitride Statement __________________________________________ 59
30. Nitrogen Statement _________________________________________ 61
31. Oxide Statement ____________________________________________ 65
32. Phosphorus Statement _______________________________________ 67
33. Plot Statement _____________________________________________ 72
34. Polysilicon Statement ______________________________________ 75
35. Print Statement ____________________________________________ 80
36. Profile Statement __________________________________________ 84
37. Resistivity Statement ______________________________________ 86
38. Savefile Statement _________________________________________ 88
39. Segregation Statement ______________________________________ 89
40. Silicon Statement __________________________________________ 92
41. Solubility Statement _______________________________________ 95
42. Stop Statement _____________________________________________ 97
43. Title Statement ____________________________________________ 98
44. Vol.Ratio Statement ________________________________________ 99
45. V.Threshold Statement ______________________________________ 101
46. WetO2 Statement ____________________________________________ 103
47. Statement Summary __________________________________________ 108
48. Example 1: NMOS Silicon Gate. ______________________________ 119
49. Example 2: Bipolar Polysilicon Doped Emitter. ______________ 147
50. Suggestions and Bug Reports ________________________________ 171