Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
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<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />
PHOSPHOR<br />
[ NAME= ] [ DONOR ]<br />
[ AT.WT= ] [ AT.NUMB= ]<br />
[ IONFILE1= ] [ IONFILE2= ]<br />
[ ( ( SILICON<br />
[ FII.0= ] [ FII.E= ]<br />
[ K.MF= ] [ K.A= ] [ K.P= ]<br />
[ MISFITST= ] [ CD= ]<br />
[ MSF111FA= ] [ MSF110FA= ] [ MSF100FA= ]<br />
[ DAMAGEST= ]<br />
[ NE.0= ] [ NE.E= ]<br />
[ ( IMPLANT | CHEMICAL )<br />
[ CTN.0= ] [ CTN.E= ] [ CTN.F= ]<br />
]<br />
)<br />
| ( POLYSILI<br />
[ ENTROPY= ] [ HEAT.SEG= ] [ Q.SITES= ]<br />
[ FII.0= ] [ FII.E= ]<br />
[ ( IMPLANT | CHEMICAL )<br />
[ CTN.0= ] [ CTN.E= ] [ CTN.F= ]<br />
]<br />
)<br />
| ( OXIDE | NITRIDE | ALUMINUM )<br />
[ ELECT.ST= ]<br />
[ DIX.0= ] [ DIX.E= ]<br />
[ DIM.0= ] [ DIM.E= ]<br />
[ DIMM.0= ] [ DIMM.E= ]<br />
]<br />
PLOT<br />
[ ACTIVE ] [ CHEMICAL ] [ TOTAL ] [ NET ]<br />
[ ANTIMONY ] [ ARSENIC ] [ BORON ] [ PHOSPHOR ]<br />
[ XMIN= ] [ XMAX= ] [ CMIN= ] [ CMAX= ]<br />
[ LAYER1 ] [ LAYER2 ] ... [ LAYER10 ]<br />
[ CLEAR ] [ AXIS ] [ LINETYPE= ]<br />
[ TITLE= ] [ LABEL= ]<br />
[ XPWIDTH= ] [ YPWIDTH= ]<br />
[ XOFFSET= ] [ YOFFSET= ]<br />
[ DEVICE= ] [ FILENAME= ]