Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
Suprem III - Stanford Technology CAD Home Page
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
-66-<br />
<strong>Suprem</strong>-<strong>III</strong> User´s Manual<br />
111.OEDF Num The orientation dependent factor for the oxidation enhanced diffusion for<br />
oriented silicon.<br />
(unit: )<br />
(default: the current value.)<br />
(synonym: )<br />
The MATERIAL statement is used to input or modify the coefficients and parameters that define a given<br />
material. Up to ten materials can be defined at one time. There are five default materials assigned the material indexes<br />
one through ten, these are single crystal silicon, silicon dioxide, polysilicon, silicon nitride, and aluminum.<br />
The first four of these should not be redefined as they are treated specially by several models in the program.<br />
The current implementation of the program allows the definition of materials made up of at most three elements.
Change language