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Handbook of Solvents - George Wypych - ChemTech - Ventech!

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1546 Isao Kimura<br />

Table 22.2.2. Typical applications <strong>of</strong> the VOC concentrator<br />

Industry Facilities Treated VOCs<br />

Automobile, Steel structure manufacturing<br />

Painting booth Toluene, xylene, esters, alcohols<br />

Steel furniture Painting booth, oven Toluene, xylene, esters, alcohols<br />

Printing Dryer Toluene, xylene, esters, alcohols<br />

Adhesive tape<br />

Hook and loop fastener<br />

Coating process<br />

Cleaning unit<br />

Chemicals Oil refinery, reactors<br />

Ketones (MEK, cyclohexanone,<br />

methyl isobutyl ketone, etc.)<br />

Aromatic hydrocarbons, organic<br />

acids, aldehydes, alcohols<br />

Plastics<br />

Synthetic resin adhesive<br />

Styrene, aldehydes, esters<br />

Plywood manufacturing process<br />

Semiconductor Cleaning unit Alcohols, ketones, amines<br />

22.2.3 CONTINUOUS PROCESS FOR AIR CLEANING USING<br />

MACROPOROUS PARTICLES AS ADSORPTION AGENTS<br />

In the photoresist segment <strong>of</strong> the semiconductor process a very low concentration <strong>of</strong> VOC is<br />

generated. These low concentration VOCs can be removed by a concentration step followed<br />

by a catalytic oxidation process. The industrial application <strong>of</strong> this method is discussed below.<br />

Dilute VOC is fed to the rotating zeolite concentrator discussed in Section 22.2.2 (honeycomb<br />

rotor) where it is concentrated to 10 times <strong>of</strong> the original concentration and burned<br />

on catalysts at relatively low temperature. This saves fuel cost. The VOC is a mixture <strong>of</strong><br />

IPA, acetone, MEK, toluene, ethyl acetate, n-hexane, propylene glycol monoethyl ether,<br />

propylene glycol monoethyl ether acetate, and tetramethyl ammonium hydroxide. The mix-<br />

Figure 22.2.3. Flow diagram <strong>of</strong> continuous air cleaning process by zeolite concentrator.

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