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Plenarvorträge - DPG-Tagungen

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Halbleiterphysik Dienstag<br />

HL 15.13 Di 13:15 H17<br />

Tunable mirrorless lasing based on short pitch Ferroelectric Liquid<br />

Crystals — •W. Haase, K. Yoshino, M. Kasano, and M.<br />

Ozaki — Technische Universitaet Darmstadt, Institut fuer Physikalische<br />

Chemie, Petersenstr. 20, 64287 Darmstadt<br />

The helical pitch of Ferroelectric Liquid Crystals can be tuned via<br />

heating or via variyng the strength of the applied external electrical<br />

field. The so called short pitch FLC-materials allowing the selective reflection<br />

of external laser light, hence they are acting as stop band. The<br />

HL 16 GaN: Bauelemente<br />

applied external field can influence the length of the helical pitch by ca.<br />

30 nm. Preparing specific mixtures is giving rise for a broad wavelength<br />

range mirrorless lasing (1,2). Along the talk the fundamentals and the<br />

experimental conditions will be discussed. 1)Electrically tunable waveguide<br />

laser based on ferroelectric liquid crystals, M. Kasano, M. Ozaki, K.<br />

Yoshino, D. Ganzke, W. Haase Appl. Phys. Lett., 82, 4026-4028 (2003). 2)<br />

Electro-Tunable Liquid-Crystal Laser M. Ozaki, M. Kasano, T. Kitasho,<br />

D. Ganzke, W. Haase, K. Yoshino, Adv. Mater., 15, 974-977 (2003)<br />

Zeit: Dienstag 10:15–12:45 Raum: H13<br />

HL 16.1 Di 10:15 H13<br />

Pt/GaN Schottky Diodes for Hydrogen Gas Sensors — •M. Ali 1 ,<br />

V. Cimalla 1 , V. Tilak 2 , D. Merfeld 2 , P. Sandvik 2 und O. Ambacher<br />

1 — 1 Technical University Ilmenau, Center of Micro- and Nanotechnologies,<br />

Gustav-Kirchhoff-Str. 1, D-98693 Ilmenau, Germany —<br />

2 General Electrics, General Electrics Global Research Europe, Wehrle<br />

Strasse 13, D-81675 München, Germany<br />

The performance of Pt/GaN Schottky diodes with different thickness<br />

of the catalytic metal were investigated as hydrogen gas detectors. The<br />

sensors were fabricated based on epitaxial Si-doped Ga-face GaN layer<br />

(ND = 9 × 10 16 cm −3 ) grown up to a thickness of about 3µm by metalorganic<br />

chemical vapour deposition on c-plane sapphire substrates. The<br />

area as well as the thickness of the Pt were varied between 250µm 2 and<br />

1000µm 2 , 80 and 400˚A, respectively. The Pt-Schottky-diodes exhibited at<br />

room temperature ideality factors, saturation currents and barrier heights<br />

between 1.3 and 3.3, 6 × 10 −11 and 1.25 × 10 −7 A and 0.64 and 0.99eV,<br />

respectively. The sensitivity to hydrogen gas was investigated in dependence<br />

on active area, Pt thickness and the operating temperature for 1%<br />

hydrogen in synthetic air. The change in gate voltage of the diode at a<br />

fixed current was monitored as the diode was exposed to hydrogen gas<br />

and for comparison to dry air in order to determine the sensor sensitivity.<br />

We observed a significant increase of sensitivity and decrease of response<br />

time by increasing the temperature of operation to about 350 ◦ C and by<br />

decreasing the Pt thickness down to 80˚A.<br />

HL 16.2 Di 10:30 H13<br />

Modification of GaN and AlGaN Surfaces for Nano- and Picofluidic<br />

Sensors — •G. Kittler, V. Cimalla, V. Lebedev, M.<br />

Fischer, V. Yanev, S. Krischok, J. A. Schaefer, and O. Ambacher<br />

— Technical University Ilmenau, Center for Micro- and Nanotechnologies,<br />

Gustav- Kirchhoff-Str. 1, D-98693 Ilmenau<br />

Because of strong spontaneous polarization and piezoelectric coefficients<br />

of GaN layers and AlGaN/GaN-heterostructures free carrier concentration<br />

profiles inside these materials are very sensitive to any manipulation<br />

of surface charge. This physical effect can be used to develop<br />

novel sensors for ion fluxes, gases and polar liquids. We have used<br />

AlGaN/GaN-heterostructures with polarization induced two dimensional<br />

electron gases in order to determine volume, pH-value, or the polarity of<br />

water based nano- and picoliter droplets. To enable the determination of<br />

physical and chemical properties of such droplets a precise control of the<br />

droplet position on the active areas of the sensors is required. Firstly miscellaneous<br />

procedures of oxidation were used to optimize the wetting of<br />

the thin GaN-cap layers, and secondly thin structured hydrophobic layers<br />

were investigated for this purpose. For the latter method different materials<br />

e.g. silicon nitride, aluminum oxide, and fluorine-carbon-compounds<br />

were examined with respect to their hydrophobic properties. Effective<br />

procedures in controlling the wetting behavior of GaN and AlGaN surface<br />

were proven by Atomic Force Microscopy (AFM), X-ray Photoelectron<br />

Spectroscopy (XPS), and contact-angle-measurements and will be<br />

presented in respect to the results obtained by electrical characterization<br />

of the first nanofluidic sensors.<br />

HL 16.3 Di 10:45 H13<br />

Studies on sub-band gap absorption of AlGaN based solar-blind<br />

photodetectors — •R. Wagner 1 , G. Cherkastinin 1 , V. Lebedev 1 ,<br />

A. T. Winzer 2 , R. Goldhahn 2 , and O. Ambacher 1 — 1 Center of<br />

Micro- and Nanotechnologies, TU Ilmenau, D-98684 Ilmenau, Germany<br />

— 2 Institute of Physics, TU Ilmenau, D-98684 Ilmenau, Germany<br />

AlGaN-based UV-detectors with high responsivities in a narrow spectral<br />

range were grown by molecular beam epitaxy on sapphire substrates.<br />

These devices are based on heterostructure combining three epitaxial Al-<br />

GaN layers with different alloy composition acting as optical filter, insulator<br />

and detector, respectively. Spectrally resolved photocurrent, photothermal<br />

deflection spectroscopy and in situ cathodoluminescence have<br />

been applied to obtain a sub- and near band gap absorption in AlGaN<br />

layers to provide detailed information about defect states in a wide energy<br />

range. By optimizing the alloy compositions and thickness of the<br />

filter layer, a peak responsivity of up to 35 A/W was achieved over a<br />

narrow range of wavelength with a peak position at 276 nm. The rejection<br />

of visible light response with respect to the peak responsivity was<br />

about 2 orders of magnitude. This type of sensors can be designed to<br />

have a highly selective response suitable for UV flame- and bio-sensors.<br />

However, a device performance of AlGaN structures is mainly limited by<br />

a high density of defects responsible for reduced UV/visible contrast and<br />

slow photoresponse. Thus, the detailed knowledge of the defect structure<br />

is necessary for the further performance improvements.<br />

HL 16.4 Di 11:00 H13<br />

Facetten-Alterung von (Al,In)GaN Laserdioden — •Thomas<br />

Schoedl 1 , Ulrich T. Schwarz 1 , Volker Kümmler 2 , Alfred<br />

Lell 2 und Volker Härle 2 — 1 Institut für Angewandte und<br />

Experimentelle Physik, Universität Regensburg, Universitätsstr. 31,<br />

93053 Regensburg, Germany — 2 OSRAM Opto Semiconductors GmbH,<br />

Wernerwerkstr. 2, 93049 Regensburg, Germany<br />

Wir untersuchen das Alterungsverhalten von (Al,In)GaN Laserdioden<br />

(LD) auf SiC Substraten in Abhängigkeit verschiedener Verspiegelungsarten.<br />

So können wir zeigen, dass es zusätzlich zum Volumeneffekt auch<br />

einen Beitrag der Laserfacetten zum Alterungsprozess gibt. Unverspiegelte<br />

LD altern deutlich schneller als verspiegelte LD. Selbst das Aufbringen<br />

einer λ/2 Schicht reduziert die Alterung deutlich, wobei die λ/2 Schicht<br />

die optischen Eigenschaften der Facette nicht verändert. Um zu prüfen,<br />

ob die Alterung lichtinduziert oder strominduziert ist, wurde eine unverspiegelte<br />

LD an Luft gealtert. Die Stromdichte wurde so gewählt, dass<br />

die LD am Anfang im Laserbetrieb war, nach einer Minute effektiver<br />

Betriebszeit aber unter die Laserschwelle fällt. Dadurch ändert sich die<br />

Photonendichte um mehrere Größenordnungen, die Alterungskurve zeigt<br />

aber keine nennenswerte Änderung im Verlauf. Weitere Versuche mit unverspiegelten<br />

LD in verschiedenen Atmosphären wie Ar, N2, O2 und H2<br />

zeigen eine langsame Alterung. Das Hinzufügen von Wasserdampf lässt<br />

die Diode wieder schnell altern. Dies lässt auf die Bildung einer Oxid-<br />

Schicht auf der Facette schließen, die die internen Verluste vergrößert<br />

und so zur Alterung führt.<br />

HL 16.5 Di 11:15 H13<br />

Biofunctionalization of AlGaN surfaces — •Barbara Baur,<br />

Georg Steinhoff, Martin Hermann, Oliver Purrucker,<br />

Motomu Tanaka, Martin Stutzmann, and Martin Eickhoff —<br />

Walter Schottky Institut, TU München, D-85748 Garching<br />

Biosensor applications of semiconductor devices for operation in aqueous<br />

electrolyte solutions are a current topic of intense research. Wide<br />

bandgap semiconductors, such as group III-nitrides are regarded as<br />

promising candidates for these applications as they combine high chemical<br />

inertness with optical transparency and low thermal noise. To combine<br />

those materials with organic systems, a detailed understanding as well as<br />

experimental techniques for the realization and control of the anorganic/<br />

organic interface are a basic requirement.<br />

We have investigated the functionalization of AlGaN surfaces by deposition<br />

of self-assembled monolayers (SAMs) based on silanes (silanization)<br />

for subsequent formation of lipid membranes. Silanization is performed<br />

by a self-assembly process from an organic solution of silane molecules.

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