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Dünne Schichten Mittwoch DS 13 Schichteigenschaften III Zeit: Mittwoch 16:45–18:00 Raum: HS 31 DS 13.1 Mi 16:45 HS 31 Microtribology of Nanocomposite Self-lubricating Coatings — •Vladislav Spassov, Imad Ahmed, Giuseppe Bregliozzi, Alan Savan und Henry Haefke — CSEM Swiss Center for Electronics and Microtechnology, Inc., Rue Jaquet-Droz 1, CH 2000, Neuchatel, Switzerland Tribological coatings deposited by sputter PVD or arc PVD methods from compound targets often contain microparticles embedded in, and projecting through, the coating. When using macroscopic tribological characterisation methods such as pin-on-disk (POD) and linear, oscillating sliding (SRV) tribometer tests, it is difficult to separate the influence of factors such as debris generation and microparticles. Often the debris built-up makes it impossible to measure the real friction coefficient of the coating against the selected material. Therefore, micro-scale analogues of the abovementioned methods have to be applied in order to study the tribological properties of a PVD coating without the influence of debris or microparticles. In the current work, the authors have used a microtribometer to examine the tribological properties of TiAlCN+MoS2 nanocomposite self-lubricating coatings against 100 Cr 6 (DIN 1.3505) steel having oscillating relative movement. The results are discussed and compared to data obtained from macroscopic pin-on-disk tests. DS 13.2 Mi 17:00 HS 31 Mechanical properties of laser deposited PMMA films — •Erik Süske 1 , Thorsten Scharf 1 , Peter Schaaf 2 , Elena Panchenko 3 , Dorit Nelke 3 , Michael Buback 3 , Harald Kijewski 4 , and Hans- Ulrich Krebs 1 — 1 Institut für Materialphysik, Tammannstr. 1, 37077 Göttingen — 2 II. Phys. Institut, Tammannstr. 1, 37077 Göttingen — 3 Institut für physikalische Chemie, Tammannstr. 6, 37077 Göttingen — 4 Institut für Rechtsmedizin, Windausweg 2, 37073 Göttingen Poly-(methyl methacrylate) (PMMA) films were laser deposited at a wavelength of 248 nm in UHV at substrate temperatures up to 250 ◦ C and characterized by infrared spectroscopy (FTIR), size eclusion chromatography (SEC), thermogravimetric analysis (TGA) and microhardness measurements. The FTIR spectra indicate a chemical structure closed to the bulk material, probably caused by a radical polymerization mechanism, with a small amount of cross-linked polymer. Nevertheless, after deposition the chain length of the PMMA is reduced to about 6000 g/mol. Due to this changes, the mechanical properties of the films vary dramatically from the bulk polymer, e.g. the hardness increases by a factor of five. During annealing the mechanical properties of the films can be systematically varied to values closed to that of bulk samples. The deposition process and properties of the films are discussed with respect to changes in chemical structure, number of cross links and chain length, while the changes in mechanical properties are concerned with relaxation effects and the stability of the polymer. DS 13.3 Mi 17:15 HS 31 Effect of Microwave radiation on structural and mechanical properties of Al2O3 thin films deposited by sol-gel process — •Phani Ayalasomayajula and Henry Haefke — CSEM Swiss Center for Electronics and Microtechnology Inc., CH-2007 Nuechatel, Switzerland The lower temperatures and shorter processing time associated with microwave irradiation might be ascribed to the activating and facilitating effect of microwave energy on solid phase diffusion. Unlike other preparation methods, microwave heating is generally significantly faster, simpler, DS 14 Schichtwachstum and very energy efficient. In the present work, alumina has been chosen because of its high hardness, chemical resistance, and scratch resistance properties. Thin films of Al2O3 have been deposited on quartz substrates at room temperature by a sol-gel dip coating technique. Two kinds of treatments have been applied to the as-deposited films for comparison: (1) furnace annealing at different temperatures ranging from 200oC to 1000oC for 5 hours and (2) exposure to different microwave radiation (2.45 MHz), with powers ranging from 200 W to 1000 W for 5 minutes. X-ray diffraction (XRD), scanning electron microscopy (SEM), and energy dispersive x-ray (EDX)analysis techniques have been employed to characterise the structural, morphological and elemental composition of the films. Nanohardness indentation tests of the films exposed to microwaves (600W and above) have shown a hardness of 8.5 GPa with an elastic modulus of 140 GPa compared to the annealed sample having 3.3 GPa with an elastic modulus 57 GPa. DS 13.4 Mi 17:30 HS 31 Characterization of the amorphous-crystalline silicon interface by time resolved surface photovoltage and photoluminescence techniques — •Abdelazize Laades, Klaus Kliefoth, Rolf Stangl, Manfred Schmidt, and Walther Fuhs — Hahn-Meitner- Institut Berlin, Abt. Silizium Photovoltaik, Kekuléstr. 5, D-12489 Berlin Amorphous silicon/crystalline silicon interfaces (a-Si:H/c-Si) were prepared by plasma enhanced chemical vapor deposition and analyzed by time resolved surface photovoltage method (TR-SPV) and photoluminescence spectroscopy (PL). To characterise the interfaces formed by varying the process parameters, the c-Si substrate is excited through the a-Si:H layer by high intensity laser pulses such that the excess carriers are predominantly generated in c-Si. It is shown that TR-SPV and PL methods are sensitive to the nonradiative recombination at the a-Si:H/c-Si interface. A qualitative approach to interpret SPV transients is presented and discussed. Applying this approach, we come to the conclusion that the best interface quality is reached at a substrate temperature around 230 ◦ C and that the a-Si:H film thickness in the range between 5 nm and 200 nm has no influence on the a-Si:H/c-Si interface properties. DS 13.5 Mi 17:45 HS 31 Nachweis akustischer Oberflächenphononen in BNbeschichteten Kohlenstofffasern — •T. Wittkowski 1 , K. Jung 1 , B. Hillebrands 1 , S. Stöckel 2 , K. Weise 2 und G. Marx 2 — 1 Fachbereich Physik und Forschungsschwerpunkt MINAS, Technische Universität Kaiserslautern, 67663 Kaiserslautern — 2 Institut für Chemie, Physikalische Chemie, Technische Universität Chemnitz, Straße der Nationen 62, 09107 Chemnitz Mit der Brillouin-Lichtstreuspektroskopie (BLS) wurden akustische Oberflächenphononen auf dünnen, unbeschichteten und beschichteten Fasern nachgewiesen. Die BLS-Analysetechnik greift bei der Messung nicht in das Materialverhalten ein, sie ist zerstörungsfrei und kann auch bei komplizierteren Probengeometrien erfolgreich eingesetzt werden. Die mit der BLS gemessene Geschwindigkeitsdispersion der Rayleigh- Mode in diesem Schicht-Substrat-System führt zu präzisen Aussagen über das elastische Verhalten der Bornitridbeschichtung. Die Ergebnisse dokumentieren den erwünschten Effekt einer deutlichen Verringerung der Schersteifigkeit der beschichteten im Vergleich zu den unbeschichteten Fasern im oberflächennahen Bereich. Aus der Dispersion erhält man zusätzliche Informationen über die Infiltration des Faserbündels während des thermischen CVD-Beschichtungsprozesses. Zeit: Mittwoch 14:30–16:15 Raum: HS 32 DS 14.1 Mi 14:30 HS 32 Microstructure of polymer-metal composite thin films grown by pulsed laser deposition — •Jörg Faupel, Thorsten Scharf, and Hans-Ulrich Krebs — Institut für Materialphysik, Universität Göttingen, Tammannstrasse 1, D-37077 Göttingen Polymer-metal composites have a wide range of applications ranging from food-packaging to microelectronics. Using an excimer laser of 248nm wavelength and 30ns pulseduration, polymer-metal composites were prepared in UHV at room temperature. For the polymer matrix BPA-polycarbonate (PC) was used, as metals Ag, Au, Cu and Pd. The samples were characterised by x-ray reflectivity and TEM using top and also cross-sectional view. The size of the spherical Ag and Au grains, embedded in a PC matrix, can be controlled by the pulse number during deposition. In the case of Cu and Pd in comparison, smaller and more grains and also a different growth behaviour is found. For polymer/metal
Dünne Schichten Mittwoch multilayers deposited the first time by pulsed laser deposition, the interface roughness strongly depends on the used metal. Differences between the polymer-metal systems are discussed with respect to the different diffusion coefficients, reactivities and growth mechanisms of the used metals on the polymer surface. DS 14.2 Mi 14:45 HS 32 In-situ x-ray diffraction during sputtering of Shape Memory Alloy (SMA) Ni-Ti thin films — •R.M.S. Martins 1,2 , N. Schell 1 , F.M.B. Fernandes 2 , and R. Silva 2 — 1 Institute of Ion Beam Physics and Materials Research, Forschungszentrum Rossendorf, P.O. Box 510119, D-01314 Dresden, Germany — 2 CENIMAT, Campus da FCT/UNL, 2829-516 Monte de Caparica, Portugal Ni-Ti thin films present great advantages for the fabrication of microactuactuators. The phase transformation and precipitation which are responsible for the shape memory effect have been widely studied in bulk material and thin films. However, in-situ studies have been limited to the aging/annealing treatments after deposition. In-situ study of the sputter deposition of Ni-Ti thin films has not yet been reported. Thus a magnetron sputter deposition chamber has been installed into the six-circle diffractometer of the ROssendorf BeamLine (ROBL-CRG) at the ESRF, Grenoble [1], and in consequence the crystallization kinetics have been followed in situ by x-ray diffraction during sputter deposition of Ni-Ti thin films. [1] W. Matz, N. Schell, J. Bøttiger et al., Rev. Sci. Instr. 72, 3344 (2001) DS 14.3 Mi 15:00 HS 32 Early Stages of Self-assembled Nanostructure Formation during Cu Deposition onto VSe2 Crystals — •S. Hollensteiner 1 , E. Spiecker 1 , W. Jäger 1 , H. Haselier 2 , and H. Schroeder 2 — 1 Technische Fakultät der CAU zu Kiel — 2 Forschungszentrum Jülich Recent investigations have shown that Cu deposition onto surfaces of layered VSe2 crystals may lead to self-assembled networks of nanostructures. TEM, SEM and AFM have been applied to characterize evolution, lateral arrangements, orientations, and the microscopic nature of the surface structures. The nanostructures were created applying UHV electron beam evaporation of Cu onto cleaved layered VSe2 crystals. The nominal Cu coverages are ranging from 0.4 nm to 2.5 nm. At the lowest coverage large isolated nanostructures with lateral dimensions > 100 nm are observed having a roof-like tile structure. At coverages of 1 nm and above a uniform network of linear nanostructures of smaller lateral dimension (∼ 20 nm) with mainly hexagonal meshes develops on substrate terraces in addition to the large nanostructures. Like the large nanostructures the smaller ones are composed of two crystalline strands. Inside the meshes, a thin layer of a new phase of uniform thickness has evolved being almost completely contiguous but separates into three equivalent orientation variants with epitaxial relationship to the substrate. These results and the absence of Cu clusters point to the formation of an intercalation phase. A dense network of dislocations has formed at the interface indicating the presence of in-plane strain. The role of strain for the formation and evolution of both the nanoroofs and the network of smaller nanostructures is discussed. DS 14.4 Mi 15:15 HS 32 Non-linear effects in the Monte Carlo simulation of sputterinduced surface morphology — •Oluwole E. Yewande, Alexander K. Hartmann, and Reiner Kree — Institute for Theoretical Physics, University of Göttingen, Tammannstr.1, 37077 Göttingen, Germany. We study the ion-beam sputtering of a solid surface using the (2+1)dimensional discrete Monte Carlo model on a lattice recently introduced 1 . We have studied two different surface diffusion mechanisms; one without and the other including a term accounting for Schwoebel barriers, and at times long enough to observe the dependence of long-time effects on surface diffusion. At short times, propagating ripple-like periodic height modulations appear on the surface. The velocity dispersion and the ripple wavelength obey scaling relations that are in qualitative agreement with experimental results 2 . At long-times, where non-linear effects are significant, the ripples vanish, and the surface topography exhibits the non-linear behaviour S(k) ∼ k −2.5 , governed by the Kardar-Parisi-Zhang universality class. [1] A. K. Hartmann, R. Kree, U. Geyer and M. Kölbel, Phys. Rev. B 65, 193403(2002). [2] S. Habenicht, K. P. Lieb, J. Koch and A. D. Wieck, Phys. Rev. B 65, 115327(2002). DS 14.5 Mi 15:30 HS 32 Structural evolution in chromium nitride thin films: A comparison with structure-zone models — •Yvonne Gerbig 1 , Corinne Nouveau 2 , and Henry Haefke 1 — 1 CSEM Swiss Center for Electronics and Microtechnology Inc, Rue Jaquet-Droz 1, CH-2007 Neuchatel, Switzerland — 2 Ecole Nationale Superieure d’Arts et Metiers, LA.Bo.MA.P, F-71250 Cluny, FranceCluny The correlation between micro/nanostructure of thin films and their deposition conditions is scientifically interesting as well as technologically relevant for the engineering of functional surfaces. In the last decades, several structure-zone models (SZMs) have been developed for thin films grown by pvd techniques to improve the under-standing of the depositionstructure relationship. The well-known SZMs of Movchan & Demchishin, Thornton and Messier consider only a few selected deposition parameters. Recently, Kelly has created a SZM using more universal energy related parameters. However, all these SZMs were developed for metal thin films and their extension to other materials, e.g. ceramic thin films, is not clear. In this study the validity of various SZMs were evaluated for CrN thin films synthesized through reactive sputtering by varying the most important deposition parameters. By applying the thickness gradient technique, the structural and morphological evolution of CrN thin films was examined using SEM, AFM and XRD. The observed microstructures and topographical features are discussed and classified as a function of deposition parameters in a new SZM based on the approaches of Thornton, Messier and Kelly. DS 14.6 Mi 15:45 HS 32 Control of surface roughness in amorphous thin film growth — •Frank Elsholz 1 , Eckehard Schöll 1 , Hans Eichler 2 , Chris Scharfenorth 2 , and Arkadi Rosenfeld 3 — 1 Institut für Theoretische Physik, Technische Universität Berlin, Hardenbergstrasse 36, D– 10623 Berlin — 2 Optisches Institut, Technische Universität Berlin, Hardenbergstrasse 36, D–10623 Berlin — 3 Max-Born-Institut, Max-Born-Str. 2a, 12489 Berlin The growth of optical layers of SiO2 and Nb2O5 on amorphous substrates is investigated. We develop a kinetic Monte-Carlo model which mimics the amorphous structure by randomly fluctuating binding energies. The resulting surface profiles are characterized by their root mean square roughness, height-height correlation functions, and growth exponents. For strong random fluctuations the growth exponents exceed the value 0.5, in good agreement with experiment. DS 14.7 Mi 16:00 HS 32 Porous Thin Films Grown by Size-Selected Si-Nanoparticles — •Felix Voigt 1 , Rudolf Brüggemann 1 , Friedrich Huisken 2 und Gottfried H. Bauer 1 — 1 Fakultät V, Institut für Physik, CvO- Universität Oldenburg, 26111 Oldenburg — 2 Laborastrophysik-Gruppe, Institut für Festkörperphysik, Friedrich-Schiller-Universität Jena, 07743 Jena Size selected Si-nanoparticles (Si-nc) with diameters ≥ 3 nm prepared in a flow reactor with CO2 laser induced SiH4 decomposition and showing strong luminescence in the visible regime after oxidation of their surface [1] have been accumulated as thin films on different substrates. These films contain clusters of conglomerated Si-nc which conserve the electronic properties of the single Si-nc such as the compression of electronic wave functions which has been verified by spectral pl-measurements. The degree of volume filling has been analyzed experimentally to about 0.3. This number is supported by a simplified numerical stick-ball model for the local arrangement of the Si-nc versus film growth time. We have studied the growth of these porous thin films by simultaneous coplanar charge transport measurements (interdigital metal contacts) and see three regimes: i) negligible transport at the beginning of film growth due to missing connections, ii) a superlinear increase of current with exponent 3/2 which will be discussed in terms of percolation transport, and iii) a linear increase with further film thickness. [1] G. Ledoux, O. Guillois, D. Porterat, C. Reynaud, F. Huisken, B. Kohn, V. Paillard, Phys. Rev. B. 62, 15 942 (2000).
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Page 503 and 504:
Page 505 and 506:
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Symposium Physics of Foams Mittwoch
Page 509 and 510:
Symposium Physics of Foams Mittwoch
Page 511 and 512:
Symposium Quantum Shot Noise in Nan
Page 513 and 514:
Symposium X-RAY Magneto-Optics Tage
Page 515 and 516:
Symposium X-RAY Magneto-Optics Dien
Page 517 and 518:
Lehrertage Regensburg Hauptvorträg
Page 519 and 520:
A. D., Mirlin .................HL 1
Page 521 and 522:
Breidenbach, Boris ........ AKB 50.
Page 523 and 524:
Elli, Alexandra .............SYLS 3
Page 525 and 526:
Greer, Lindsay ......... M 9.1, M 1
Page 527 and 528:
Horn-von Hoegen, M. O 13.2, O 14.40
Page 529 and 530:
Korn, Tobias ...............MA 13.6
Page 531 and 532:
Martin, Tobias ............. MA 13.
Page 533 and 534:
Partyka, Ewa ................ M 18.
Page 535 and 536:
Rugeramigabo, Eddy Patrick O 14.38,
Page 537 and 538:
Sihler, J. .................... DS
Page 539 and 540:
Volz, K. .................... HL 44
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