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Plenarvorträge - DPG-Tagungen

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Dünne Schichten Mittwoch<br />

multilayers deposited the first time by pulsed laser deposition, the interface<br />

roughness strongly depends on the used metal.<br />

Differences between the polymer-metal systems are discussed with respect<br />

to the different diffusion coefficients, reactivities and growth mechanisms<br />

of the used metals on the polymer surface.<br />

DS 14.2 Mi 14:45 HS 32<br />

In-situ x-ray diffraction during sputtering of Shape Memory<br />

Alloy (SMA) Ni-Ti thin films — •R.M.S. Martins 1,2 , N.<br />

Schell 1 , F.M.B. Fernandes 2 , and R. Silva 2 — 1 Institute of Ion<br />

Beam Physics and Materials Research, Forschungszentrum Rossendorf,<br />

P.O. Box 510119, D-01314 Dresden, Germany — 2 CENIMAT, Campus<br />

da FCT/UNL, 2829-516 Monte de Caparica, Portugal<br />

Ni-Ti thin films present great advantages for the fabrication of microactuactuators.<br />

The phase transformation and precipitation which are responsible<br />

for the shape memory effect have been widely studied in bulk<br />

material and thin films. However, in-situ studies have been limited to the<br />

aging/annealing treatments after deposition. In-situ study of the sputter<br />

deposition of Ni-Ti thin films has not yet been reported. Thus a magnetron<br />

sputter deposition chamber has been installed into the six-circle<br />

diffractometer of the ROssendorf BeamLine (ROBL-CRG) at the ESRF,<br />

Grenoble [1], and in consequence the crystallization kinetics have been<br />

followed in situ by x-ray diffraction during sputter deposition of Ni-Ti<br />

thin films.<br />

[1] W. Matz, N. Schell, J. Bøttiger et al., Rev. Sci. Instr. 72, 3344 (2001)<br />

DS 14.3 Mi 15:00 HS 32<br />

Early Stages of Self-assembled Nanostructure Formation during<br />

Cu Deposition onto VSe2 Crystals — •S. Hollensteiner 1 ,<br />

E. Spiecker 1 , W. Jäger 1 , H. Haselier 2 , and H. Schroeder 2 —<br />

1 Technische Fakultät der CAU zu Kiel — 2 Forschungszentrum Jülich<br />

Recent investigations have shown that Cu deposition onto surfaces of<br />

layered VSe2 crystals may lead to self-assembled networks of nanostructures.<br />

TEM, SEM and AFM have been applied to characterize evolution,<br />

lateral arrangements, orientations, and the microscopic nature of the surface<br />

structures. The nanostructures were created applying UHV electron<br />

beam evaporation of Cu onto cleaved layered VSe2 crystals. The nominal<br />

Cu coverages are ranging from 0.4 nm to 2.5 nm. At the lowest coverage<br />

large isolated nanostructures with lateral dimensions > 100 nm are observed<br />

having a roof-like tile structure. At coverages of 1 nm and above<br />

a uniform network of linear nanostructures of smaller lateral dimension<br />

(∼ 20 nm) with mainly hexagonal meshes develops on substrate terraces<br />

in addition to the large nanostructures. Like the large nanostructures the<br />

smaller ones are composed of two crystalline strands. Inside the meshes,<br />

a thin layer of a new phase of uniform thickness has evolved being almost<br />

completely contiguous but separates into three equivalent orientation<br />

variants with epitaxial relationship to the substrate. These results<br />

and the absence of Cu clusters point to the formation of an intercalation<br />

phase. A dense network of dislocations has formed at the interface<br />

indicating the presence of in-plane strain. The role of strain for the formation<br />

and evolution of both the nanoroofs and the network of smaller<br />

nanostructures is discussed.<br />

DS 14.4 Mi 15:15 HS 32<br />

Non-linear effects in the Monte Carlo simulation of sputterinduced<br />

surface morphology — •Oluwole E. Yewande, Alexander<br />

K. Hartmann, and Reiner Kree — Institute for Theoretical<br />

Physics, University of Göttingen, Tammannstr.1, 37077 Göttingen, Germany.<br />

We study the ion-beam sputtering of a solid surface using the (2+1)dimensional<br />

discrete Monte Carlo model on a lattice recently introduced 1 .<br />

We have studied two different surface diffusion mechanisms; one without<br />

and the other including a term accounting for Schwoebel barriers, and<br />

at times long enough to observe the dependence of long-time effects on<br />

surface diffusion. At short times, propagating ripple-like periodic height<br />

modulations appear on the surface. The velocity dispersion and the ripple<br />

wavelength obey scaling relations that are in qualitative agreement<br />

with experimental results 2 . At long-times, where non-linear effects are<br />

significant, the ripples vanish, and the surface topography exhibits the<br />

non-linear behaviour S(k) ∼ k −2.5 , governed by the Kardar-Parisi-Zhang<br />

universality class.<br />

[1] A. K. Hartmann, R. Kree, U. Geyer and M. Kölbel, Phys. Rev. B 65,<br />

193403(2002).<br />

[2] S. Habenicht, K. P. Lieb, J. Koch and A. D. Wieck, Phys. Rev. B 65,<br />

115327(2002).<br />

DS 14.5 Mi 15:30 HS 32<br />

Structural evolution in chromium nitride thin films: A<br />

comparison with structure-zone models — •Yvonne Gerbig 1 ,<br />

Corinne Nouveau 2 , and Henry Haefke 1 — 1 CSEM Swiss Center<br />

for Electronics and Microtechnology Inc, Rue Jaquet-Droz 1, CH-2007<br />

Neuchatel, Switzerland — 2 Ecole Nationale Superieure d’Arts et<br />

Metiers, LA.Bo.MA.P, F-71250 Cluny, FranceCluny<br />

The correlation between micro/nanostructure of thin films and their<br />

deposition conditions is scientifically interesting as well as technologically<br />

relevant for the engineering of functional surfaces. In the last decades,<br />

several structure-zone models (SZMs) have been developed for thin films<br />

grown by pvd techniques to improve the under-standing of the depositionstructure<br />

relationship.<br />

The well-known SZMs of Movchan & Demchishin, Thornton and<br />

Messier consider only a few selected deposition parameters. Recently,<br />

Kelly has created a SZM using more universal energy related parameters.<br />

However, all these SZMs were developed for metal thin films and<br />

their extension to other materials, e.g. ceramic thin films, is not clear.<br />

In this study the validity of various SZMs were evaluated for CrN thin<br />

films synthesized through reactive sputtering by varying the most important<br />

deposition parameters. By applying the thickness gradient technique,<br />

the structural and morphological evolution of CrN thin films was<br />

examined using SEM, AFM and XRD. The observed microstructures and<br />

topographical features are discussed and classified as a function of deposition<br />

parameters in a new SZM based on the approaches of Thornton,<br />

Messier and Kelly.<br />

DS 14.6 Mi 15:45 HS 32<br />

Control of surface roughness in amorphous thin film growth<br />

— •Frank Elsholz 1 , Eckehard Schöll 1 , Hans Eichler 2 , Chris<br />

Scharfenorth 2 , and Arkadi Rosenfeld 3 — 1 Institut für Theoretische<br />

Physik, Technische Universität Berlin, Hardenbergstrasse 36, D–<br />

10623 Berlin — 2 Optisches Institut, Technische Universität Berlin, Hardenbergstrasse<br />

36, D–10623 Berlin — 3 Max-Born-Institut, Max-Born-Str.<br />

2a, 12489 Berlin<br />

The growth of optical layers of SiO2 and Nb2O5 on amorphous substrates<br />

is investigated. We develop a kinetic Monte-Carlo model which<br />

mimics the amorphous structure by randomly fluctuating binding energies.<br />

The resulting surface profiles are characterized by their root mean<br />

square roughness, height-height correlation functions, and growth exponents.<br />

For strong random fluctuations the growth exponents exceed the<br />

value 0.5, in good agreement with experiment.<br />

DS 14.7 Mi 16:00 HS 32<br />

Porous Thin Films Grown by Size-Selected Si-Nanoparticles<br />

— •Felix Voigt 1 , Rudolf Brüggemann 1 , Friedrich Huisken 2<br />

und Gottfried H. Bauer 1 — 1 Fakultät V, Institut für Physik, CvO-<br />

Universität Oldenburg, 26111 Oldenburg — 2 Laborastrophysik-Gruppe,<br />

Institut für Festkörperphysik, Friedrich-Schiller-Universität Jena, 07743<br />

Jena<br />

Size selected Si-nanoparticles (Si-nc) with diameters ≥ 3 nm prepared<br />

in a flow reactor with CO2 laser induced SiH4 decomposition and showing<br />

strong luminescence in the visible regime after oxidation of their<br />

surface [1] have been accumulated as thin films on different substrates.<br />

These films contain clusters of conglomerated Si-nc which conserve the<br />

electronic properties of the single Si-nc such as the compression of electronic<br />

wave functions which has been verified by spectral pl-measurements.<br />

The degree of volume filling has been analyzed experimentally to about<br />

0.3. This number is supported by a simplified numerical stick-ball model<br />

for the local arrangement of the Si-nc versus film growth time. We<br />

have studied the growth of these porous thin films by simultaneous coplanar<br />

charge transport measurements (interdigital metal contacts) and see<br />

three regimes: i) negligible transport at the beginning of film growth due<br />

to missing connections, ii) a superlinear increase of current with exponent<br />

3/2 which will be discussed in terms of percolation transport, and iii) a<br />

linear increase with further film thickness. [1] G. Ledoux, O. Guillois, D.<br />

Porterat, C. Reynaud, F. Huisken, B. Kohn, V. Paillard, Phys. Rev. B.<br />

62, 15 942 (2000).

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