A Guide to the Russian Academy of Sciences - University of Texas ...

planned to build production premises, administrative building and a special building
for production of integral circuits in cooperation with the Experimental Plant for
Scientific Equipment USSR Academy of Sciences.
These tasks determined the structure of research and production departments. Moreover,
some joint laboratories were created together with a plant of the Ministry of
electronic industry, research institutes of the Ministry of means of communication,
and GIREDMET Institute of the Ministry of nonferrous metallurgy.
IPTM grew quickly and by 1990 its staff increased to 800 people as compared to 320
people in 1984. The Institute established working contacts with many institutes of
the USSR Academy of Sciences, Moscow State University named after
Lomonosov, plants, and research institutes of Moscow, Leningrad (St-Petersburg),
Minsk, Novosibirsk, Erevan, Kiev, Gorki (N. Novgorod), Kishinev, Tomsk,
Vyborg, Zelenograd, Fryazino and other towns. Agreements on scientific and
technological cooperation were signed with some research institutions in France,
Sweden, Great Britain, Bulgaria, GDR, and Hungary.
Research workers of our Institute participated in international and All-Union conferences
and symposia. The Institute was the organizer of four All-Union seminars on micro
lithography and two All-Union conferences on scanning electron microscopy. It
participated in organizing Russian-German and Russian-Ukrainian symposia on
analytical chemistry, IV International Conference on X-ray Microscopy, Soviet-
Iapanese Seminar on Grain Boundary, Soviet-French Seminar on X-ray
Microscopy, and many others.
The first paper on the work done at the Institute (Kratschmer E., Erko A., Petrashov V.T.,
and Beneking., Device Fabrication by Nano lithography and Electroplating for
Magnetic Quantization Measurements.-- Appl. Phys. Lett., vol. 4 (10), 15 May,
1984, pp. 1011-1013) was presented for publication in January 1984. By 1994, the
research workers of the Institute, who are now 145 including 21 doctors and 102
candidates of sciences, published more than 900 works, made over 1000 reports at
various conferences, and received 100 inventor's certificates.
In the period 1984 to 1994, people at the Institute presented 16 doctorate and 47 candidate
dissertations. Students from some educational institutions such as Moscow Steel
and Alloys Institute (department of metallography) Moscow Physico-Technical
Institute (department of nono-electronics), Moscow State University (department of
electronics) do their graduation papers at our Institute. The Institute is also involved
in the work of the IPTM- FTIAN-MGU scientific-educational center.
This collection of papers presents the major results of the ten-year research work, although
it does not cover the whole spectrum of research carried on at the Institute.
Our research was carried on in cooperation with researchers from other institutes both in
Russia and abroad. You will find their names among the authors of the papersons
In the Introduction I would like to emphasize that workers of our Institute initiated
research in two original directions that received world-wide recognition: metallic
nano-electronics and Bragg-Fresnel x-ray optics. They also developed original
techniques in electron-beam and ion lithography, plasma-chemical etching, and film
deposition by CVD, ECR, electron-beam, magnetron and laser sputtering. These
techniques make the basis for devices, set-ups and new technologies designed and
developed at the Institute now. The research in the field of preparation and analysis
of pure substances, started at the Institute of Solid State Physics, is successfully
829