15.01.2013 Views

U. Glaeser

U. Glaeser

U. Glaeser

SHOW MORE
SHOW LESS

You also want an ePaper? Increase the reach of your titles

YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.

FIGURE 41.26 Overlay accuracy measurement system.<br />

FIGURE 41.27 Cross-sectional view.<br />

References<br />

B<br />

1. Yoshiaki Hagiwara, “Solid State Device Lecture Series Aph/E183 at CalTech” in 1998–1999,<br />

http:www.ssdp.Caltech.edu/aphee183/<br />

2. Yoshiaki Hagiwara, “Measurement technology for home entertainment LSI chips,” Presentation at the<br />

Tutorial Session in ICMTS2001, Kobe, Japan, March 19–22, 2001.<br />

3. M. Fujita and H. Kitano: “{{D}evelopment of and {A}utonomous {Q}uadruped {R}obot for {R}obot<br />

{E}ntertainment},” Autonomous Robots, vol. 5, pp. 7–8, Kluwer Academic Publishers, Dordrecht, the<br />

Netherlands, 1998.<br />

4. Kohtaro Sabe, “Architecture of entertainment robot-development of AIBO –,” IEEE Computer Element<br />

MESA Workshop 2001, Mesa, Arizona, Jan. 14–17, 2001.<br />

5. JP 1215101 (a Japanese Patent #58-46905), Nov. 10, 1975 by Yoshiaki Hagiwara.<br />

© 2002 by CRC Press LLC<br />

δ<br />

A<br />

O<br />

A B<br />

40 µm<br />

y<br />

3 Metal Via<br />

A<br />

Cell Capacitor<br />

Bit Line<br />

Word Line<br />

DRAM Region<br />

B<br />

Reference Pattern A<br />

Resist Pattern B<br />

x<br />

*3 nm TIS Accuracy<br />

*130 Wafers per hour (300 mmφ)<br />

*Ethernet Data Transfer System<br />

Courtesy of Hitachi Electronics Engineering Co.,Ltd<br />

0.18 µ<br />

m Embedded DRAM Logic<br />

5 Metal Via<br />

4 Metal Contact<br />

LA3200<br />

5 Metal<br />

4 Metal<br />

3 Metal<br />

2 Metal<br />

1 Metal<br />

1 Metal Contact<br />

P1L (0.15Gate)<br />

Logic Region<br />

2 Metal Via

Hooray! Your file is uploaded and ready to be published.

Saved successfully!

Ooh no, something went wrong!