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U. Glaeser

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TABLE 47.2 Critical Area Extraction Time (in seconds) on Silicon Graphics Indy Workstation<br />

for Five Values of x max<br />

Integrated<br />

Circuit<br />

is trivial and takes a constant time. Step 2 is a loop with, on an average, √n elements under which are<br />

four substeps are required. Substeps 2.1 and 2.2 take O(√n) expected time due to the √n length of elements<br />

in SOR and TR. Substep 2.3 takes a constant time. Substep 4 has √n elements in a loop, under which<br />

sub-substeps 2.4.1 and 2.4.2 take O(√n). Hence, substep 4 takes O(n) time. As a result, step 2 takes O(n√n)<br />

time. Note that the critical areas A s and A o are calculated using Simpson’s method for numerical integration<br />

with the x-resolution 0.1 µm. Finally, step 3 takes a constant time. From the previous idealized<br />

analysis, the complexity of this algorithm is CO(n√n), where C is a constant. The approaches used in<br />

[41,42,44] promise O(n log n) performance, even though authors note that the actual consumption of<br />

CPU time is a very intensive.<br />

Because today’s VLSI circuits can contain up to 10 million transistors, the limitation of memory<br />

resources places an important role on extraction efficiency. To avoid running out of memory, specialcoding<br />

techniques have to be employed. These techniques decrease the extraction efficiency, particularly<br />

for very big circuits. In general, this memory limitation problem affects the algorithms regardless of<br />

which data structure is used for the node representation of the active list. However, a singly linked list<br />

suffers the least due to its memory efficiency. Thus, a list structure is preferred as far as memory space<br />

is concerned. The memory consumption of EXACCA is proportional to √n.<br />

Here, the simulated results of five examples, which were designed using double metal CMOS process,<br />

will be presented. The number of rectangles, as well as the CPU time of EXACCA on Silicon Graphics<br />

Indy workstation for these five IC layouts called chip, counter4, counter6, counter8, and counter10 are<br />

shown in Table 47.2. The extraction speed is illustrated by the analysis of CPU times needed for the<br />

computation of critical areas for short and open circuits for five values of the largest defect diameter x max.<br />

The extraction results show that a CPU time increases as the diameter of largest defect increases. Namely,<br />

the increase of the largest defect diameter means a greater threshold for updating the active list and,<br />

consequently, a greater number of rectangles in the active list. The increase of the number of comparisons<br />

between rectangle pairs causes a corresponding increase of the critical area extraction time. As can be<br />

seen from Table 47.2, one of the most important advantages of the proposed extraction algorithm and<br />

corresponding data structures is the ability to process large layouts in a relatively short CPU time.<br />

Applications<br />

EXACCA ensures the microscopic layout information needed for more detailed analysis. Thus, the output<br />

of EXACCA may be used for any IC yield simulation system and design rule checking system. Also, our<br />

software system is useful for the classical yield models that require knowing the critical area of an IC<br />

chip. Caution should be taken in this case as the total critical area of a chip must be computed by finding<br />

the union of (not by adding) the critical areas. Regardless of the fact that this section has focused only<br />

on the extraction of critical areas, EXACCA can also be easily modified for the extraction of parasitic<br />

effects. Although the critical areas are required for the simulation of functional failures, the extraction<br />

of parasitic effects can be used for the simulation of performance failures.<br />

This software system is capable to perform the critical area extraction hierarchically. Namely, TRACIF<br />

is capable to transform a CIF file to sorted lists in a hierarchical way. This feature is desirable since most<br />

of the modern IC designs exploit the technique of design hierarchy. Within this design methodology, the<br />

critical area extraction is only required once for each layout cell. Therefore, CPU time can be reduced<br />

© 2002 by CRC Press LLC<br />

Number<br />

of Rectangles 10 µm 12 µm 14 µm 16 µm 18 µm<br />

chip 4125 65.1 83.7 89.4 97.8 112.0<br />

counter4 11637 342.4 379.5 406.7 459.9 503.1<br />

counter6 19503 600.2 631.4 685.5 792.6 885.9<br />

counter8 24677 897.6 954.2 1083.6 1217.8 1399.8<br />

counter10 30198 1116.0 1338.1 1542.2 1689.5 1880.3

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