Abstracts Book - IMRC 2018

• SB4-P020
GROWTH AND REACTION MECHANISM OF ALUMINIUM DOPED
ZINC OXIDE NANOSHEETS ON ALN SEED LAYER FOR FLEXIBLE
AND WAFER SUBSTRATES.
Edgardo Uriel León Salguero 1 , Josefina Alvarado Rivera 1 , Frank Güell 3 , Gonzalo Murillo 2
1 Universidad de Sonora, Posgrado en Nanotecnologia, Mexico. 2 nstituto de Microelectrónica de
Barcelona (IMB-CNM, CSIC), Department of Nano and Microsystems, Spain. 3 Universitat de
Barcelona, Departament de electronica, Spain.
Aluminium doped ZnO, ZnO:Al (AZO) maintains most of the favorable
characteristics of ZnO such as low toxicity, low-cost synthesis and transparency
in the visible region for thin films applications. The improved electrical and
optical properties of AZO make it as a more economical alternative to ITO
(Indium Tin Oxide) with comparable performance, while depending of dopant
percentage its piezoelectric performance seems to improve, due to the mild
hydrothermal method used to synthetize it, it can be deposited on both flexible
and wafer substrates, making it a strong candidate for wearable electronics due
to its very low toxicity (ZnO being used even in skin care products). This work
proposes to analyze the mechanism of ZnO NS as well AZO NSs growth over AlN
seeded substrates in which, most of the AlN participates as reagent in the
growth of AZO NSs. A part of the AlN is dissociated and some is integrated into
the NSs, effectively doping them. The remaining AlN is dissolved in the growth
solution during the synthesis process. A uniform forest of high aspect-ratio NSs
and even higher volume to area ratio material is generated. This ZnO
nanostructures grow with NS geometry, integrating part of the aluminum ions
into the ZnO wurtzite lattice substitutionally. We analyze it by PL, SEM, EDS, XRD
and XPS. Confirming doping and suggesting the proposed growth mechanism.
Acknowledgment:
We express gratitude to Instituto de Microelectronica de Barcelona – Centro
Nacional de Microelectronica (CNM-IMB), and the Universitat de Barcelona for
the use of their installations and all the support, Programa Nacional de Becas
Mixtas of Consejo Nacional de Ciencia y Tecnologia (CONACYT) for financial
support.
Keywords: AZO, aluminium doped zinc oxide, growth mechanism
Presenting authors email: eleonsal@hotmail.com