Abstracts Book - IMRC 2018

• SA6-P069
EFFECT OF NITROGEN FLOW RATE ON MICROSTRUCTURE,
HARDNESS AND TRIBOLOGICAL BEHAVIOR OF
NANOSTRUCTURED MULTILAYER HF/HFN COATINGS DEPOSITED
BY DC MAGNETRON SPUTTERING
Leandro Garcia Gonzalez 1 , Carlos Eduardo García Tolentino 2 , Daniel de Jesús Araujo Pérez 1 ,
Luis Zamora Peredo 1 , José de Jesús Pérez Bueno 3 , Nelly Flores Ramirez 4 , Salomon Ramiro
Vasquez Garcia 5 , Julian Hernandez Torres 6
1 Universidad Veracruzana, Centro de Investigación en Micro y Nanotecnología, Mexico.
2 Universidad Veracruzana, Facultad de Ingeniería en Metalurgia y Ciencia de los Materiales,
Mexico. 3 Centro de Investigación y Desarrollo Tecnológico en Electroquímica, , Mexico.
4 Universidad Michoacana de San Nicolás de Hidalgo, Wood Engineering and Technology,
Mexico. 5 Universidad Michoacana de San Nicolás de Hidalgo, Department of Chemical
Engineering, Mexico. 6 Universidad Veracruzana, Research Center for Micro and
Nanotechnology, Mexico.
Nanostructured multilayer Hf/HfN coatings were deposited onto a stainless
steel 316 substrate by DC magnetron sputtering in order improve its resistance
and hardness. The applied power was 200W on a hafnium target in a DC source,
while the number of the nanostructured multilayer of Hf/HfN was fixed to 40.
The argon flow was kept constant at 10 sccm whereas the nitrogen flow was
variated by 2.5, 3.5, 4.5 and 5.5 sccm. The coatings were characterized by Vickers
microhardness, micro tribology, scanning electron microscopy and X-ray
photoelectron spectroscopy. The higher hardness value reached 41.89 GPa
obtained at 2.5 sccm, considering it as a superhard coating. Additionally, for the
2.5 sccm nitrogen flow, the lowest friction coefficient was obtained at 0.2 leading
to the lowers sample wear rate of 4.49 /N/m. As the nitrogen flow was
increasing, the hardness and the thickness of the coatings decreased while, the
friction coefficient and wear rate increased. From the XPS results it was clear to
distinguish the presence of three signals for the 2.5 and 3.5 sccm coatings: two
related to the Hf-N-Hf and one to the Hf-N-O, however, the higher nitrogen flow
coatings of 4.5 and 5.5 sccm evinced an off of one Hf-N-HF signal, which could
be related to the inferior mechanical and tribological properties.
Acknowledgment: Centro de Investigación en Micro y Nanotecnología,
Universidad Veracruzana, C.P. 94294, Boca del Río, Veracruz, México.
Keywords: Nanostructured, sputtering, Hf/HfN
Presenting authors email: salomon_vg@yahoo.com