Abstracts Book - IMRC 2018

• SA1-O004
MICROPATTERNING OF NANOGRAPHENE SHEETS GROWN
DIRECTLY ON DIELECTRIC SUBSTRATES
Jorge Luis Cholula Díaz 1 , José Barzola Quiquia 2
1 Tecnológico de Monterrey, School of Engineering and Science, Mexico. 2 University of Leipzig,
Felix-Bloch-Institut für Festkörperphysik, Germany.
The demonstration of the direct deposition of nanographene sheets (NGSs) on
dielectric substrates by catalyst-free CVD variants has encouraged an intensive
research activity in this area. The aim of this work was to deposit well conductive
NGS-based thin films on common mm 2 -area dielectrics substrates (Si3N4, SiO2,
glass, etc.) commonly used in semiconductor technologies. Furthermore, this
simple and low-cost method should be compatible with well establish
lithography processes in order to pattern the as-prepared films in arbitrary
geometries and sizes. In this experimental work, we report the one-step
synthesis of NGSs-based thin films toluene by catalyst-free aerosol-assisted
chemical vapor deposition. The as-synthesized NGSs were characterized by
Raman spectroscopy, X-ray diffraction (XRD), high-resolution transmission
electron and atomic force microscopy, in which the typical characteristics of a
nanocrystalline graphite material (nanographene) were observed. The asprepared
NGSs-based thin films were patterned into a ”Hall-bar-like”
microstructure of 20 μm width and 50 μm length by electron-beam lithography
(EBL) and oxygen plasma etching techniques. The structural characterization by
means of Raman spectroscopy revealed that the NGS-based micropatterns
retains its structural integrity after the microstructuring process. Furthermore,
temperature-dependent, magnetoresistance and Hall effect measurements
carried out on the NGS-based micropatterns showed that their electrical
properties are well described by theories used for typical low-dimensional
carbon based materials, as carbon multiwall nanotubes and multigraphene
samples. Finally, this combined deposition and microstructuring method may
be employed in large-scale industrial production of nanographene electrodes
with arbitrary shape and size.
Acknowledgment:
JLCD acknowledge the financial support provided by the School of Engineering
and Sciences Tecnologico de Monterrey through the Research Group on Optics
and Lasers. JBQ thanks the financial support by Universität Leipzig.