Abstracts Book - IMRC 2018

• SF2-P070
PHYSICAL PROPERTIES OF CHEMICALLY SPRAYED FLUORINE-
DOPED ZNO THIN FILMS
Maria de la Luz Olvera Amador 1 , Arturo Maldonado Alvarez 1
1 CINVESTAV-IPN, Departamento de Ingeniería Eléctrica-Sección de Electrónica del Estado
Sólido, Mexico.
Zinc oxide thin films, ZnO, doped with some group III elements and fluorine from
group VII, can be applied as transparent conductive electrodes in different
optoelectronic applications. Despite the fact that lot of results have been
reported in the scientific literature, a complete understanding on the effect of
some deposition parameters on the physical properties of ZnO thin films is still
far from being reached. For instance, a beneficial effect of the acidity and the
aging of the starting solution on the resistivity and the surface texturing in ZnO
films has been observed in our laboratory. Due to the lack of more detailed
information, we search for an improvement in the transport properties,
structure and surface morphology of ZnO thin films by using different zinc
precursors, dopants, solvents, molar concentrations, among others. In this work
we are presenting the last results obtained about fluorine-doped zinc oxide
(ZnO:F) thin films deposited on sodalime glass substrates from zinc acetate and
hydrofluoric acid by the chemical spray deposition technique. The effects of the
acetic acid content in the starting solution, and the substrate temperature on
the electrical resistivity, morphology and optical characteristics were studied.
The samples were polycrystalline in nature, but as the acetic acid content in the
starting solution increases, the preferential orientation shows a switching from
(002) to (101). For a predetermined substrate temperature of deposition, as the
acetic acid content increases, the resistivity values show a corresponding
increase. The minimum resistivity, in the order of 6x10-3 ohm-cm, was found in
films deposited with the lowest acetic acid content. The morphology of the
surface varies from agglomerated grains to rod-like shaped grains as a function
of the acetic acid content. The photoluminescence spectra show a prevalence of
the violet emission, indicative of the high density of grain boundary defects that
show a decrease as the acetic acid content increases.
Keywords: ZnO, Thin films, Transparent electrodes
Presenting authors email: molvera@cinvestav.mx