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Abstracts Book - IMRC 2018

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• SA3-O005 Invited Talk<br />

TUNING THE TRANSPORT PROPERTIES OF WSe2 2d MATERIALS<br />

Philip Rack 1,2<br />

1 Oak Ridge National Laboratory, Center for Nanophase Materials Science, United States. 2 The<br />

University of Tennessee, Materials Science and Engineering, United States.<br />

Transition metal dichalgogenide (TMD) materials are intriguing layered<br />

materials with finite band gaps, which make them interesting candidates for<br />

electronic and optoelectronic applications. In addition to the usual anion and<br />

cation alloying for tuning the band gap, one can also tune the band gap based<br />

on the number of TMD layers. In our group, we have focused on various<br />

methods to explore and control the transport properties in primarily<br />

WSe2. Conveniently WSE2 is ambipolar, and we will show that the dominant<br />

carrier type can be controlled via the number of layers and judicious choices of<br />

the metal work function. In addition, we will overview our work utilizing the<br />

helium gas field ion microscope as a nanoscale direct write method to introduce<br />

defects into the WSe2 and further control the transport behavior in both<br />

multilayer and single layer WSe2 devices. A semiconductor to insulator to<br />

pseudo-metallic transition occurs with increasing He + flux (ranging ~ 1x10 13<br />

to1x10 16 He + /cm 2 ). The He + preferentially sputters selenium and the resultant<br />

selenium vacancies at low concentration are n-type dopants and at higher<br />

concentrations form a percolating network of states and thus have pseudometallic<br />

transport. Direct write resistor loaded inverters and edge contacted<br />

transistors have been achieved towards atomically thin 2D circuitry. Finally, we<br />

have explored gas-assisted focused He+ etching of WSe2 nanoribbons and have<br />

achieved sub 10 nm resolution.<br />

Acknowledgment:<br />

PDR acknowledges support support by US Department of Energy (DOE) under<br />

Grant No. DOE DE-SC0002136 and a portion of this work was supported by the<br />

U.S. Department of Energy, Office of Science, Basic Energy Sciences, Materials<br />

Sciences and Engineering Division and performed in part as a user project at the<br />

Center for Nanophase Materials Sciences.<br />

Keywords: Transition metal dichalcogenide, atomic ciruits, electronic devices<br />

Presenting authors email: prack@utk.edu

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