Abstracts Book - IMRC 2018

• SA6-P162
STUDY OF SELF-ASSEMBLY PROCESS OF IN-RICH
NANOSTRUCTURES CONTROLLED BY HYDROGEN PLASMA
Sarai Vazquez y Parraguirre 1 , Ismael Cosme Bolaños 1,2 , Svetlana Mansurova 1 , Andrey Kosarev 3 ,
Yuriy Kudriavtsev 4 , Netzahualcoyotl Carlos Ramirez 3 , Adrian Itzmoyotl Toxqui 3
1
Instituto Nacional de Astrofísica, Óptica y Electrónica, Optics, Mexico. 2 Consejo Nacional de
Ciencia y Tecnologia - CONACYT, Optics, Mexico. 3 Instituto Nacional de Astrofísica, Óptica y
Electrónica, Electronics, Mexico. 4 Cinvestav Zacatenco, Solid-state electronics, Mexico.
In this work we present the fabrication of self-assembled In-rich nanostructures
via ITO thin films exposed to plasma process treatment. The pristine Indium tin
oxide (ITO) thin films were deposited by RF magnetron sputtering at different
fabrication parameters on Corning glass. The self-assembled nanostructure
process was carried out by exposing the thin films to an H plasma processing
via Plasma Enhanced Chemical Vapor Deposition (PECVD). The effect of time
process, pressure and power of H plasma on the nanoparticle formation was
investigated. Atomic Force microscopy (AFM) and Scanning Electron Microscopy
(SEM) were used for morphology analysis. Compositional, optical and electronic
characteristic were studied and related to the final shape and size of the
nanoparticles.
Keywords: nanostructures, ITO, nanoparticle
Presenting authors email: svqzyp@gmail.com