Abstracts Book - IMRC 2018

• SD4-O018 Invited Talk
NEW AND NOVEL DETECTION SYSTEMS IN THE TRANSMISSION
ELECTRON MICROSCOPE.
Jan Ringnalda 1
1 FEI, Materials Science, United States.
In modern Scanning Transmission Electron Microscope (STEM) systems, the
ability to move/tilt the sample, inspect it at the highest resolution and extract
the maximum amount of scientific data from the sample in the most expedient
manner is the key to being able to successfully analyze dose sensitive
materials. In fact these systems can now generate such powerful beams, that
all materials can be damaged by them. Hence there is a real need to be able to
analyze materials faster, and this can be done by utilizing more modern and
efficient detectors. We have seen big improvements in the efficiency of EDS
detectors, and by combining symmetrical EDS detection with sample tilt, 3D
elemental mapping can be done in an automated manner. CMOS cameras are
much faster and have a better signal to noise ratio, allowing faster imaging and
better images to be obtained with less electrons. Special pixel-array detectors
such as the EMPAD (Electron Microscope Pixel Array Detector) that is being
developed in collaboration with Cornell University allow all of the electrons to
be collected rapidly in diffraction modes. Examples of new systems and the
capabilities they provide will be shown.
Acknowledgment:
The author acknowledges Dr. David Muller from Cornell University for many
helpful discussions and examples.
Keywords: STEM, Materials Science, EMPAD
Presenting authors email: jan.ringnalda@fei.com