Abstracts Book - IMRC 2018

• SD6-O008 Invited Talk
CHARACTERIZATION BY TEM ORIENTATION IMAGING (EBSD-
TEM) IN COMBINATION WITH STRAIN ANALYSIS , 3D DIFFRACTION
TOMOGRAPHY AND E-PDF AT NANOMETER SCALE
Stavros Nicolopoulos 1 , Partha Pratim Das 1
1 NanoMEGAS SPRL, Research and Development, Belgium.
SEM based EBSD techniques over the last decade have demonstrated the value
of crystallographic/texture information, which provides insight on interfaces,
local orientation and phase structure with resolution of 50 nm (SEM-FEG
instruments). Very recently TKD (transmission Kikuchi Diffraction) technique in
SEM have pushed further this up to 10 nm or lower. The development of TEM
based- automated crystallographic mapping techniques (ASTAR) in combination
with precession electron diffraction (PED) has enabled the resolution further
down to 1 nm scale. Combination of ASTAR 4D scanning orientation/phase map
technique with advanced TEM Cs corrected /FEG instruments over the last
decade has allowed study of various materials such as metals /alloys, minerals ,
semiconductors and even organic materials. The combination of PED with
scanning nanodiffraction enables to measure accurately strain (precision up to
0.01%) with 3-5 nm resolution at metals, alloys and semiconductor
devices. Although TEM orientation imaging (and EBSD-SEM) works well with
known materials structures (unit cell and atomic coordinates) however both
techniques are limited when we deal with unknown phases. ADT 3D (automatic
diffraction tomography combined with precession diffraction) allows 3D
reciprocal space reconstruction tilted ED series (usually every 1 deg)
nanocrystals as small as 50 nm. More than 200 unknown structures have been
solved recently (metals to minerals and organic compounds) by measuring ED
intensities and where atomic positions could be located with picometer level
precision. Recent development of e-PDF (electron Pair Distribution Function)
technique in TEM allows to analyse at local scale Electron Diffraction (ED)
patterns even amorphous materials. e-PDF technique allows to analyse
interatomic distances, bonding and possible short/large scale order of
nanocrystalline /amorphous materials at nm scale , enabling to study the
structure of glassy materials, nanocatalysts , amorphous thin films and
amorphous/ re-crystallization studies in semiconductor devices. We will present
various application examples of PED combination with TEM orientation imaging
in technological interest materials , and selected examples strain , ADT and e-