Abstracts Book - IMRC 2018

• SA3-P010
CHARACTERIZATION AND SYNTHESIS OF MoS2 THIN-FILMS BY
PULSED LASER DEPOSITION CONTROLLING THE MEAN KINETIC
ENERGY OF THE PLASMA
Eduardo Israel Acosta Reynoso 1 , Enrique Campos Gonzalez 2 , Armando Perez Centeno 3 , Miguel
Angel Santana Aranda 3 , Gilberto Gomez Rosas 3 , Dagoberto Cardona 4 , José Guadalupe
Quñones Galván 3
1 Instituto Tecnológico y de Estudios Superiores de Occidente A.C., Physics and Mathematics,
Mexico. 2 Instituto Nacional de Investigaciones Nucleares (ININ), Physics, Mexico. 3 Universidad
de Guadalajara, Physics, Mexico. 4 Instituto Tecnológico y de Estudios Superiores de Occidente
A.C., Mathematics and physics, Mexico.
In recent years, molybdenum disulfide (MoS2) has become a material of great
interest for research in material science. Due to its 2-dimentional graphene-like
structure and its band gap within the visible spectrum, many possible
applications for electronic and optoelectronic devices could arise. In this work,
thin-films of MoS2 were deposited using Pulsed Laser Deposition (PLD) on glass
substrates at room temperature and deposition pressure of 2x10 -5 Torr. We
used a MoS2 target obtained by compressing high purity powders and a Nd-YAG
pulsed laser with wavelength of 1064 nm. Plasmas were diagnosed by means of
the time of flight technique using a Langmuir planar probe; the voltage across a
20 Ohm resistance was measured and the current was calculated in order to
estimate the ion density and its Mean Kinetic Energy (MKE). The crystalline
properties of the deposits were characterized using Raman spectroscopy and X-
Ray Diffraction (XRD) and their optical properties by Visible-Ultraviolet (Uv-Vis)
spectroscopy. Their chemical composition and stoichiometry were measured
and estimated by X-ray Photoelectron Spectroscopy (XPS) and Energy Dispersion
Spectroscopy (EDS) and their thickness and morphology were characterized
using Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM).
It was observed that the crystallinity was influenced by the MKE of the
plasma. Results are discussed has function of the plasma’s MKE.
Acknowledgment: Ruben Montelongo ITESO for the XPS measurements, Sergio
Oliva UDG for XRD measurements and Guadalupe Cardenas UDG for the
Grazing incidence X-ray Diffraction analysis.
Keywords: Molybdenum disulfide, PLD, Langmuir plasma measurement
Presenting authors email: dixi_1903@hotmail.com